Pipe Connection Structure With Dual-Ring Sealing for Orifice Plates
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Solution Overview
Problem
Conventional pipe connection methods in semiconductor manufacturing equipment often fail to maintain sealability at multiple points, leading to contamination and corrosion when dealing with corrosive or toxic gases, and the risk of fluid leakage, which compromises the reliability of the connection.
Innovation Solution
A pipe connection structure that includes a joint with specific through holes and concave parts, rings, and a fastening member with varying hardness levels, where the rings are pressed against the pipe to secure the orifice plate, ensuring sealability at multiple points through a combination of tapered surfaces and carburizing treatments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single sealing point is used in conventional pipe connections, then the connection structure is simple, but sealability is insufficient leading to fluid leakage and contamination
Solution Approach 1:
The connection structure is divided into multiple sealing points: the first seal is formed between the first ring and the pipe at the first contact surface, and the second seal is formed between the second ring and the pipe at the second contact surface. This segmentation of sealing functions ensures that fluid leakage is prevented at multiple locations, significantly improving reliability without requiring a completely new connection design.
Solution Approach 2:
The first ring and second ring are nested on the pipe in sequence, with the first ring positioned at the first concave part and the second ring at the second concave part. The rings are arranged in a nested configuration along the pipe length, allowing multiple sealing functions to be integrated into a compact connection structure that maintains both reliability and space efficiency.
2Reliability
If rings with high hardness are used to ensure sealing, then sealability improves, but the rings may damage the pipe surface
Solution Approach 1:
Different hardness levels are assigned to different rings based on their specific functions: the first ring has hardness between 30-50 HRC to provide sealing without damaging the pipe, while the second ring has higher hardness of 55-65 HRC to ensure sealing at the second contact surface where the installation surface is located. This local differentiation of material properties optimizes both sealability and protection of the pipe surface.
3Stability of the object's composition
If the pipe is firmly fixed to prevent movement, then connection stability improves, but the orifice plate may not be properly pressed against the installation surface
Solution Approach 1:
The connection structure incorporates controlled movement capability: the pipe can move in the axial direction relative to the joint within certain limits, and the second ring can rotate around the pipe. This dynamic design allows the pipe to shift position to ensure proper contact between the orifice plate and the installation surface, while the overall connection remains stable through the nested ring structure and threaded fastening.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively maintains sealability at multiple points, preventing fluid leakage and corrosion, enhancing the reliability and workability of the pipe connection while allowing for easy maintenance and stable gas supply in semiconductor manufacturing equipment.
Implementation Method 1
a fastening member having a second through hole through which the pipe is inserted, a second concave part communicated with the second through hole, a second contact surface provided to the second concave part at an open end of the second through hole and with which the second ring is brought into contact, and a screw part which is screwed to a screw part provided to the joint, by screwing of the screw parts, pressing the first ring and the second ring held between the first contact surface and the second contact surface against the first contact surface
Implementation Method 2
making the first ring and the second ring bite into the pipe to fix the first ring and the second ring to the pipe
Implementation Method 3
making the pipe fixed by the first ring and the second ring move to a joint side by a pressing force to press the orifice plate installed to the installation surface against the installation surface side with a tip of the pipe
Data Source
AI summary
A first ring and a second ring are inserted through the pipe. The pipe is inserted through a fastening member, and a tip of the pipe is inserted into a first concave part of the joint. By screwing a screw part of the fastening member to a screw part of the joint, the first ring and the second ring are pressed against the first contact surface provided to the first concave part, and bite into the pipe to fix the pipe. Further, the pipe fixed by the first ring and the second ring is moved to a joint side by a pressing force to press an orifice plate installed in the joint. Consequently, it is possible to maintain sealability of a flow path in the joint at a plurality of places including a place of the orifice plate.