Pipe Connection Assembly for Stress-Resistant Substrate Drying Chambers
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing substrate treating apparatuses used for supercritical drying processes face issues with stress concentration at the welds between the pressure vessel and the pipe, leading to reduced durability and potential damage.
Innovation Solution
The apparatus incorporates a pipe connection assembly with a protruding port and a connection pipe connected by welding, surrounded by a protective cap to distribute stress and prevent concentration at the welds, along with through-holes and expansion pipes with matching diameters and surface roughness to enhance durability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a supercritical drying process is used to replace rinse solution with organic solvent, then drying effectiveness is improved, but stress concentration at welds reduces durability
Solution Approach 1:
The supply pipe is divided into multiple sections: a first supply pipe connected to the supercritical fluid supply, a second supply pipe connected to the chamber body, and a connection portion joining them. This segmentation isolates the welds from the high-stress supercritical fluid environment while maintaining the functional integrity of the fluid supply system.
Solution Approach 2:
The connection portion acts as an intermediary element between the supercritical fluid supply and the chamber body. It serves as a buffer zone that protects the chamber body welds from direct exposure to supercritical fluid pressure, thereby preventing stress concentration while enabling effective drying.
2Device complexity
If a pipe is directly welded to chamber body, then connection simplicity is improved, but stress concentration causes durability reduction
Solution Approach 1:
The connection structure is segmented into three distinct parts: first supply pipe, connection portion, and second supply pipe. This segmentation adds structural complexity that distributes stress away from critical weld zones, extending the chamber body's service life despite the increased component count.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design improves the durability of the substrate treating apparatus by reducing stress concentration and protecting the welds, thereby enhancing the longevity and reliability of the apparatus.
Implementation Method 1
a drying gas is supplied to a sealed process chamber and is heated and pressurized. Accordingly, the temperature and process of the drying gas both increase over critical points and the state of the drying gas changes into a supercritical state
Data Source
AI summary
The present invention provides a substrate treating apparatus. The substrate treating apparatus includes: a vessel providing a sealable treatment space; and a substrate supporting member positioned in the treatment space of the vessel and supporting a substrate, wherein the vessel includes: a through-hole formed through from an outer surface to an inner surface such that a process fluid is supplied to the treatment space; and a pipe connection assembly provided on an outer surface on which the through-hole is formed, and provided for connection with a process fluid supply pipe.