Pipe Flange Clamp Structure for Misaligned Vacuum Pipe Assembly

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Solution Overview

Problem

Existing pipe connection structures in vacuum processing apparatuses face challenges in absorbing errors during assembly, particularly when pipe axes do not coincide, leading to flow disruptions and increased risk of corrosion due to complex structures.

Innovation Solution

A pipe connection structure featuring flange portions with sealing and sliding members, and a pipe clamp that connects and fastens pipes at multiple positions, including where axes do not coincide, providing flexibility and reducing corrosion risk through a simpler design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a bellows is used for exhaust pipe to absorb error of each part, then assembly errors can be absorbed, but the structure becomes complex and corrosion risk increases

Engineering Contradiction:
Improveassembly error absorptionVSAvoidstructure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent employs a flexible grommet (rubber member) that acts as a flexible element to absorb assembly errors between the exhaust pipe and flange. This flexible component allows for misalignment compensation without requiring complex bellows structures, thereby reducing overall structural complexity while maintaining error absorption capability.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent uses a simple, replaceable grommet instead of a complex, durable bellows structure. The grommet is a cost-effective, easily replaceable component that achieves the same error absorption function with much simpler construction, reducing both manufacturing complexity and corrosion management burden.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

2Manufacturing precision

If a bellows is used for exhaust pipe to absorb error of each part, then assembly errors can be absorbed, but corrosion management becomes more difficult

Engineering Contradiction:
Improveassembly error absorptionVSAvoidcorrosion management
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The flexible grommet provides a simple, smooth-surfaced component that resists corrosion naturally and is easy to replace if corroded. Unlike bellows with multiple folds and crevices where corrosion can accumulate, the grommet's simple geometry makes it resistant to corrosion and easy to maintain.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The grommet is designed as an inexpensive, easily replaceable component. If corrosion occurs, the entire grommet can be quickly replaced without complex disassembly or specialized maintenance procedures, significantly improving ease of corrosion management compared to integrated bellows structures.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Adaptability or versatility

If pipe clamp connects and fastens flange portions at multiple positions including where axes do not coincide, then assembly flexibility is improved, but the connection structure becomes more complex

Engineering Contradiction:
Improveassembly flexibilityVSAvoidconnection structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The pipe clamp is designed as a multi-functional component that simultaneously provides mechanical fastening and positional adjustment capabilities. By integrating both clamping and alignment functions into a single device, the overall connection structure remains simple while achieving high assembly flexibility for accommodating non-coincident pipe axes.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent combines multiple functions (fastening, positioning, and alignment) into a single pipe clamp assembly. This merging of functions reduces the number of separate components needed, thereby simplifying the overall connection structure while maintaining the ability to handle misaligned pipe axes.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11774017B2Pipe connection structure and processing apparatus
Publication Date: 2023.10.03 TOKYO ELECTRON LTD
  • US11774017B2 patent drawing
  • US11774017B2 patent drawing
  • US11774017B2 patent drawing

AI summary

A pipe connection structure provided in a processing apparatus, includes a first pipe having a first flange portion formed at one end thereof, a second pipe having a second flange portion formed at one end thereof and connected to the first flange portion, and a pipe clamp configured to connect and fasten the first flange portion and the second flange portion at a plurality of positions including a position where a pipe axis of the first pipe and a pipe axis of the second pipe do not coincide with each other.