Pipe Flange Clamp Structure for Misaligned Vacuum Pipe Assembly
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Solution Overview
Problem
Existing pipe connection structures in vacuum processing apparatuses face challenges in absorbing errors during assembly, particularly when pipe axes do not coincide, leading to flow disruptions and increased risk of corrosion due to complex structures.
Innovation Solution
A pipe connection structure featuring flange portions with sealing and sliding members, and a pipe clamp that connects and fastens pipes at multiple positions, including where axes do not coincide, providing flexibility and reducing corrosion risk through a simpler design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a bellows is used for exhaust pipe to absorb error of each part, then assembly errors can be absorbed, but the structure becomes complex and corrosion risk increases
Solution Approach 1:
The patent employs a flexible grommet (rubber member) that acts as a flexible element to absorb assembly errors between the exhaust pipe and flange. This flexible component allows for misalignment compensation without requiring complex bellows structures, thereby reducing overall structural complexity while maintaining error absorption capability.
Solution Approach 2:
The patent uses a simple, replaceable grommet instead of a complex, durable bellows structure. The grommet is a cost-effective, easily replaceable component that achieves the same error absorption function with much simpler construction, reducing both manufacturing complexity and corrosion management burden.
2Manufacturing precision
If a bellows is used for exhaust pipe to absorb error of each part, then assembly errors can be absorbed, but corrosion management becomes more difficult
Solution Approach 1:
The flexible grommet provides a simple, smooth-surfaced component that resists corrosion naturally and is easy to replace if corroded. Unlike bellows with multiple folds and crevices where corrosion can accumulate, the grommet's simple geometry makes it resistant to corrosion and easy to maintain.
Solution Approach 2:
The grommet is designed as an inexpensive, easily replaceable component. If corrosion occurs, the entire grommet can be quickly replaced without complex disassembly or specialized maintenance procedures, significantly improving ease of corrosion management compared to integrated bellows structures.
3Adaptability or versatility
If pipe clamp connects and fastens flange portions at multiple positions including where axes do not coincide, then assembly flexibility is improved, but the connection structure becomes more complex
Solution Approach 1:
The pipe clamp is designed as a multi-functional component that simultaneously provides mechanical fastening and positional adjustment capabilities. By integrating both clamping and alignment functions into a single device, the overall connection structure remains simple while achieving high assembly flexibility for accommodating non-coincident pipe axes.
Solution Approach 2:
The patent combines multiple functions (fastening, positioning, and alignment) into a single pipe clamp assembly. This merging of functions reduces the number of separate components needed, thereby simplifying the overall connection structure while maintaining the ability to handle misaligned pipe axes.
Data Source
AI summary
A pipe connection structure provided in a processing apparatus, includes a first pipe having a first flange portion formed at one end thereof, a second pipe having a second flange portion formed at one end thereof and connected to the first flange portion, and a pipe clamp configured to connect and fasten the first flange portion and the second flange portion at a plurality of positions including a position where a pipe axis of the first pipe and a pipe axis of the second pipe do not coincide with each other.


