Pipe Flow Simulation Using Pressure Sensors for Exhaust Prediction
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Solution Overview
Problem
The increasing number of apparatuses in semiconductor manufacturing facilities necessitates precise prediction of fluid flow rates and pressures to manage the exhausted state more accurately, as the complexity of pipe networks grows, impacting contamination control and temperature management.
Innovation Solution
A fluid analysis method using a processor to generate simulation models based on pipe shape information and pressure sensor data, predicting flow rates and pressures, and visualizing the exhausted state of pipes to optimize fluid management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of apparatuses and pipes increases to handle more semiconductor manufacturing processes, then the fluid management capability is improved, but the complexity of the pipe network increases making accurate flow rate and pressure prediction difficult
Solution Approach 1:
The patent creates a virtual copy of the physical pipe network as a simulation model that replicates the hydraulic characteristics. This digital twin allows accurate prediction of flow rates and pressures without physically measuring every parameter in the complex network, solving the contradiction by replacing physical measurement complexity with virtual simulation.
Solution Approach 2:
The simulation model serves multiple functions: it predicts flow rates, predicts pressures, analyzes hydraulic characteristics, and optimizes fluid management. This multi-functional approach handles the increasing complexity of pipe networks with a single versatile tool rather than multiple separate measurement and calculation systems.
2Ease of manufacture
If traditional measurement methods are used in complex pipe networks, then the implementation is simple, but the measurement precision of flow rates and pressures deteriorates
Solution Approach 1:
The patent introduces a simulation model as an intermediary between the physical pipe network and the measurement process. Instead of directly measuring flow rates and pressures in the complex network, the model acts as a mediator that calculates these parameters based on input data, achieving high precision without direct physical measurement in every location.
Solution Approach 2:
The patent replaces traditional mechanical measurement systems with a computational simulation approach. Instead of using physical flow meters and pressure sensors throughout the network, the system uses computer-based simulation to predict parameters, achieving higher precision while simplifying the physical measurement infrastructure.
3Measurement precision
If simulation models are generated for each pipe configuration change, then the prediction accuracy is improved, but the analysis time and computational resources increase
Solution Approach 1:
The patent performs preliminary actions by establishing the simulation model structure and hydraulic characteristics in advance. When pipe configurations change, the pre-established model framework can be updated more efficiently, reducing the time required for re-analysis while maintaining accuracy.
Solution Approach 2:
The simulation model is designed to be dynamic and adaptable to configuration changes. Rather than creating entirely new models for each change, the system dynamically updates the existing model parameters and structure, allowing rapid re-analysis when pipe networks are modified while maintaining prediction accuracy.
Data Source
AI summary
A fluid analysis method performed by a processor, includes: acquiring shape information about a first pipe and a second pipe, wherein the first pipe comprises an end having a pressure sensor mounted thereat, and a first outlet connected to the end, and wherein the second pipe comprises a second outlet connected to the first pipe and an inlet connected to the second outlet; generating a first simulation model based on the shape information, a first pressure value at the end of the first pipe, and a second pressure value at the inlet of the second pipe; and predicting, using the first simulation model, a flow rate value of fluid flowing into the second pipe and a pressure value of fluid discharged from the first pipe.