Piping System Protrusions Reduce Particle Accumulation
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Solution Overview
Problem
Conventional piping systems in the semiconductor industry face issues with rupture and particle accumulation due to improper configuration and space constraints, making them difficult to maintain and inspect, especially when pressurized chemicals are used.
Innovation Solution
A piping system featuring a collecting pipe with protrusions that are integrally formed and arranged to surround the outer surface, allowing for perpendicular connection to a drain pipe, reducing particle accumulation and enhancing maintenance accessibility by using a supporting structure with a through hole and a receiving groove for leak collection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If flexible connecting pipes are used to connect scrubbers due to space constraints, then the piping system can be installed in limited space, but the pipes can easily rupture when pressurizing motors are used and chemicals or particles can accumulate in the pipes
Solution Approach 1:
The collecting pipe is segmented into a main body and multiple protrusions, each protrusion serving as an independent connection point for scrubbers. This segmentation allows the system to accommodate multiple scrubbers in limited space while maintaining structural integrity and avoiding the use of flexible pipes that are prone to rupture.
2Volume of moving object
If flexible connecting pipes are used for connection due to space constraints, then installation is possible, but inspection and maintenance become difficult
Solution Approach 1:
The collecting pipe is divided into a main body and multiple detachable protrusions. Each protrusion can be independently removed from the main body, providing easy access for inspection and maintenance of connected scrubbers without requiring complex disassembly of flexible pipes.
3Volume of moving object
If improper piping configuration is used due to space constraints, then installation is possible, but chemicals and particles accumulate in the pipes
Solution Approach 1:
The protrusions extend radially outward from the main body in perpendicular directions, creating a three-dimensional configuration that prevents particle accumulation by ensuring proper flow paths and avoiding dead zones where chemicals and particles could settle.
Data Source
AI summary
A piping system is provided, connecting a plurality of scrubbers which are disposed on a supporting structure, including a collecting pipe and a drain pipe. The collecting pipe has a main body and a plurality of protrusions, wherein the main body has an outer surface and a first central axis. The protrusions are protruding from the outer surface, and the first central axis is perpendicular to the supporting structure. The collecting pipe communicates with the scrubbers via the protrusions. The drain pipe is disposed under the supporting structure and has a second central axis, wherein the collecting pipe is extended through the supporting structure and connects to the drain pipe, and the first central axis is perpendicular to the second central axis.