Piston Assembly Flow Paths for Particle-Free Air Cylinders
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Solution Overview
Problem
Air cylinders used in substrate processing apparatuses face challenges with particle leakage due to worn sealing rings, especially in harsh environments, leading to contamination of surroundings and wafers, as existing solutions either consume space or fail to effectively remove particles.
Innovation Solution
A piston assembly design featuring a piston body with a sealing ring and a solid lubricant, along with particle discharge flow paths and grooves, which directs particles generated by the sealing ring to a negative pressure forming device, preventing external leakage and enhancing lubrication through a solid or porous lubricant structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a cover is added to surround the air cylinder to prevent particle leakage, then particle containment is improved, but device complexity and space occupation increase
Solution Approach 1:
The harmful particles are extracted and removed from the system through dedicated particle discharge flow paths that lead to a suction device, rather than containing them with additional external structures. This extracts the problem (particles) from the system in a controlled manner.
Solution Approach 2:
A suction device acts as an intermediary element that actively removes particles from the air cylinder environment. This mediator component handles the particle removal function, allowing the air cylinder itself to maintain its original simple structure while still achieving particle containment.
2Object-affected harmful factors
If a cover is added to surround the air cylinder to prevent particle leakage, then particle containment is improved, but the space occupied increases
Solution Approach 1:
Instead of adding external containment structures that occupy space, the particle discharge flow paths extract particles directly from their source and transport them outside the air cylinder through integrated channels, achieving containment without increasing the overall footprint.
Solution Approach 2:
The particle discharge flow paths are nested within the existing air cylinder structure, utilizing the internal space and existing components. The suction device and flow paths are integrated into the cylinder's architecture rather than adding external layers.
3Force
If lubricant is supplied regularly to reduce friction, then friction reduction is improved, but maintenance complexity increases
Solution Approach 1:
The air cylinder system performs self-lubrication through the solid lubricant structure that is integrated into the piston assembly. The lubricant is applied automatically during normal operation without requiring external intervention or regular maintenance, making the system self-sufficient.
Solution Approach 2:
The lubrication approach changes from liquid lubricant requiring periodic application to a solid lubricant structure that provides continuous lubrication. This parameter change in lubricant state and delivery mechanism eliminates the need for regular maintenance while maintaining friction reduction.
4Adaptability or versatility
If the sealing ring operates in harsh environments, then operational versatility is improved, but particle generation and wear increase
Solution Approach 1:
The wear particles generated by the sealing ring in harsh environments are converted from a harmful contaminant into a manageable byproduct. The particle discharge flow paths and suction device capture these particles, transforming the wear problem into a controlled removal process that prevents contamination.
Solution Approach 2:
The suction device serves as an intermediary that separates and removes wear particles from the operational environment. This allows the sealing ring to continue operating in harsh conditions while the mediator handles the removal of generated particles, maintaining system cleanliness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents particle leakage and contamination by directing particles to a suction device, while the solid or porous lubricant structure provides long-term lubrication, reducing maintenance needs and maintaining cleanliness within the air cylinder.
Implementation Method 1
a solid lubricant disposed in the second groove... When the piston assembly moves, since the sealing ring moves while being in close contact with an inner surface of the cylinder body, a lubricant may be applied to the inner surface of the cylinder body in order to reduce friction
Implementation Method 2
a particle discharge flow path extending from an internal space of the piston body to the outer surface of the piston body... which directs particles generated by the sealing ring to a negative pressure forming device
Data Source
AI summary
The present disclosure is to provide a piston assembly in which a particle does not leak out of a cylinder, and including, in an embodiment, a piston body; a piston rod connected to the piston body; a first groove formed in an outer surface of the piston body; and a particle discharge flow path extending from an internal space of the piston body to the outer surface of the piston body.