Piston Speed Control in Substrate Drive Assemblies
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Solution Overview
Problem
Existing substrate treating apparatuses face challenges in automatically adjusting the speed of pistons within drive assemblies, leading to inefficiencies in substrate processing due to variations in moving speed compared to set speeds during operations like cleaning, deposition, and ion implantation.
Innovation Solution
A substrate treating apparatus with a drive assembly that includes a cylinder, piston, and a pipe control unit, where sensors detect the piston's moving speed and adjust fluid flow or pressure through connected pipes to maintain the set speed, utilizing a pipe control module to automatically adjust fluid flow rates and pressures as needed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a drive member with cylinder and piston structures is used to operate process chambers, then the substrate treating apparatus can perform various processes (cleaning, deposition, etching, ion implantation), but the piston moving speed varies and cannot be automatically adjusted to maintain consistent operation speed
Solution Approach 1:
The patent implements a feedback control system where sensors detect the actual piston position and speed, and this information is fed back to a control unit that adjusts the fluid supply to the cylinder accordingly. This closed-loop feedback mechanism enables automatic adjustment of piston moving speed to maintain consistent operation speed despite variations in load or environmental conditions.
Solution Approach 2:
The control unit dynamically changes the parameters of fluid supply (flow rate, pressure) to the cylinder based on detected piston position and speed. By adjusting these fluid parameters in real-time, the system can precisely control the piston moving speed to match the desired speed profile for different process stages.
2Productivity
If fixed fluid supply is used to the cylinder, then the drive assembly structure is simple, but the piston speed cannot be adjusted and deviates from set speed during operation
Solution Approach 1:
The system uses sensors to detect actual piston position and speed, feeding this information back to a control unit that automatically adjusts fluid supply parameters. This feedback mechanism enables precise speed control to optimize substrate processing efficiency without requiring overly complex mechanical modifications to the drive assembly.
Solution Approach 2:
The patent replaces complex mechanical speed control mechanisms with a control system that uses sensors and fluid parameter adjustment. Instead of using mechanical variable speed drives or complex gear systems, the invention uses electronic sensing and control of fluid pressure/flow to achieve speed regulation, simplifying the overall system architecture.
3Manufacturing precision
If sensors and pipe control units are added to detect and adjust piston speed, then the piston can move at desired speed with improved precision, but the drive assembly structure becomes more complex
Solution Approach 1:
Sensors detect the actual piston position and speed, providing feedback to a control unit that compares the actual speed with the desired speed. Based on this comparison, the control unit automatically adjusts fluid supply parameters to minimize speed deviation, achieving precise speed control through this closed-loop feedback mechanism.
Solution Approach 2:
The patent introduces a pipe control unit as an intermediary between the fluid supply system and the cylinder. This intermediary component regulates fluid flow and pressure based on control signals, acting as a mediator that translates control commands into precise adjustments of piston speed, thereby achieving accurate speed control with minimal direct modification to the cylinder-piston mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures that the piston moves at the desired speed, improving operational efficiency and consistency in substrate processing by dynamically adjusting fluid flow and pressure to match set speeds, thereby enhancing the precision and reliability of processes like cleaning, deposition, and ion implantation.
Implementation Method 1
a pipe control module controlling a fluid flowing through the pipes
Implementation Method 2
adjust the pipe control module to increase a pressure of a fluid flowing through the first pipe or the second pipe
Data Source
AI summary
Provided is a substrate treating apparatus. The substrate treating apparatus includes: a transfer chamber conveying a substrate; a process chamber disposed adjacent to the transfer chamber and performing a treating process o the substrate; and a drive assembly supplying a power by which a component of the transfer chamber or the process chamber operates, wherein the drive assembly includes: a cylinder connected to pipes; a piston disposed to be movable inside the cylinder and connected to the component by a drive shaft; and a pipe control unit automatically adjusting a moving speed of the piston.