Piston Valve Venting to Prevent Condensation and Freezing
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Solution Overview
Problem
Valve devices configured to control the flow rate of temperature control fluids in substrate processing apparatuses face issues with condensation or freezing when cooled by low-temperature fluids and risk high-temperature degradation when heated, due to moisture condensation or air discharge.
Innovation Solution
The valve device incorporates pressure control spaces with leak portions that allow air to leak, maintaining pressure levels necessary for piston movement while preventing condensation and freezing by continuously replacing air within these spaces, thus suppressing temperature fluctuations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If air is supplied into the pressure control space to move the piston, then the valve can switch opening/closing, but moisture condensation or freezing occurs when cooled by low-temperature fluids
Solution Approach 1:
The patent extracts the harmful moisture component from the air supplied to the pressure control space by introducing a temperature control fluid that absorbs moisture, thereby preventing condensation and freezing while maintaining the air pressure needed for reliable valve switching
Solution Approach 2:
The temperature control fluid acts as an intermediary substance between the air supply and the valve components, absorbing moisture and heat to prevent harmful condensation and freezing effects while allowing the air pressure to function properly
2Reliability
If air is supplied into the pressure control space to move the piston, then the valve can switch opening/closing, but high-temperature degradation occurs when heated
Solution Approach 1:
The temperature control fluid extracts excess heat from the air in the pressure control space, preventing high-temperature degradation of valve components while maintaining sufficient air pressure for reliable piston movement and valve switching
Solution Approach 2:
The temperature control fluid serves as a thermal intermediary, absorbing excess heat from the pressurized air to protect valve components from high-temperature degradation while allowing the air pressure to maintain reliable switching operation
3Reliability
If the pressure control space is sealed to maintain pressure for piston movement, then valve switching is reliable, but temperature fluctuations cause condensation and freezing
Solution Approach 1:
The temperature control fluid continuously circulates through the pressure control space, continuously absorbing temperature fluctuations and moisture while maintaining stable air pressure for reliable valve switching, preventing condensation and freezing through ongoing thermal regulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents condensation and freezing issues when using cooled fluids and avoids high-temperature degradation when using heated fluids, ensuring reliable operation by maintaining optimal air conditions within the valve device.
Implementation Method 1
The leak portion communicates with the pressure control space, and allows the air supplied into the pressure control space to leak therethrough
Implementation Method 2
A temperature control fluid is introduced through the first port. The temperature control fluid introduced into the first port is discharged through the second port
Data Source
AI summary
A temperature control fluid is introduced through a first port. The temperature control fluid introduced into the first port is discharged through a second port. A piston is configured to be moved by a pressure to open or close a path connecting the first port and the second port. A pressure control space is provided at at least one side of a moving direction of the piston when the path is opened or closed. Air is supplied into the pressure control space through a third port. A leak portion communicates with the pressure control space, and allows the air supplied into the pressure control space to leak therethrough.