Pivotable Gas Purge Nozzle With Elastic Seal For Misalignment

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Solution Overview

Problem

Conventional gas purge units for semiconductor manufacturing face issues with leakage and contamination due to positional variations and inclination of gas supply nozzles, leading to poor seal performance and potential mixing of particles or outside air into wafer transport containers.

Innovation Solution

A gas purge unit design featuring a nozzle member with a cylindrical projection and a pivotable body in a ring shape, supported by compressively elastically deformable pivot support portions, which allows for angular adjustment and sealing without rubbing, ensuring airtight connection and minimizing particle contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a nozzle member is made pivotable to accommodate positional variation and inclination, then seal performance is improved, but device complexity increases due to additional pivot mechanisms

Engineering Contradiction:

Improveseal performanceVSAvoidnozzle structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The nozzle member is made dynamically pivotable through a pivot support portion that allows rotational movement. This dynamic adjustment enables the nozzle to adapt to positional variations and inclination of the gas supply port, maintaining seal performance without requiring complex fixed adjustment mechanisms.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The pivot support portion changes the positional parameter of the nozzle member by allowing it to rotate and adjust its angle. This parameter change accommodates variations in the gas supply port position and inclination, maintaining effective sealing while keeping the structure relatively simple.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If elastic members are used to ensure sealing during pivoting, then seal performance is improved, but particle contamination increases due to rubbing chips generated by friction

Engineering Contradiction:

Improveseal performanceVSAvoidparticle contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The harmful rubbing action and chip generation are extracted from the pivot support portion by using an elastic member that deforms compressively rather than through friction. The elastic member absorbs the pivoting motion through deformation, eliminating the rubbing interface that would generate particles.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The mechanical rubbing-based sealing mechanism is replaced with an elastic deformation-based sealing mechanism. Instead of relying on friction between rubbing surfaces, the elastic member maintains sealing through compressive deformation, eliminating particle generation from rubbing chips.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If a pivotable body is introduced to accommodate misalignment, then adaptability is improved, but device complexity increases due to additional components

Engineering Contradiction:

Improveaccommodation of positional variationVSAvoidstructure complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The pivot support function and elastic sealing function are merged into a single integrated component. The elastic member simultaneously provides the pivot support necessary for adaptability and the sealing function, reducing the number of separate components while maintaining both adaptability and simplicity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The elastic member serves multiple functions: it acts as a pivot support allowing angular adjustment, provides sealing through compressive deformation, and accommodates positional variations. This multi-functionality increases adaptability while avoiding the need for separate dedicated components for each function.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design maintains excellent seal performance, prevents leakage and contamination, and allows for smooth operation even with positional displacement or inclination, enhancing the cleanliness and efficiency of gas purging within the container.

Implementation Method 1

a first pivot support portion with ring shape held between a rear end of the pivotable body and the base portion in a compressively elastically deformable manner along a longitudinal direction of the cylindrical projection

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS9833817B2Gas purge unit, load port apparatus, and installation stand for purging container

Publication Date: 2017.12.05 TDK CORP

AI summary

A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact part 34 capable of detachably contacting with an intake port 5 on a tip portion of the pivotable body 31. The ring-shaped O-ring 33 is held between a rear end of the pivotable body 31 and a base portion 28a of the nozzle 28 in a compressively elastically deformable manner along a longitudinal direction of the cylindrical projection 28b.