Pivotable Workpiece Handling Module for Unhindered Chamber Access
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Solution Overview
Problem
Conventional substrate processing systems face limitations in accessing internal areas for exchanging payloads or substrates due to the need for mechanical devices like sliding or lifting mechanisms, which can complicate and hinder the process.
Innovation Solution
The system employs a workpiece processing tool with a transport chamber module and interface section that allows for unhindered access through a pivotable housing configuration, enabling manual or automated loading/unloading without additional mechanical devices, using a clamshell-like design with inclined sealing surfaces and assistive opening mechanisms to maintain a controlled environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional atmospheric doors or lids are used for access to the internal chamber, then the chamber can be sealed and controlled, but access is substantially limited and requires sliding or lifting mechanisms
Solution Approach 1:
The housing is divided into a first housing member and a second housing member that can move independently relative to each other. The second housing member can be pivoted open to provide access to the internal chamber without requiring complex sliding or lifting mechanisms, thus simplifying the device while maintaining controlled access.
Solution Approach 2:
The second housing member is made movable relative to the first housing member through pivotal motion. This dynamic configuration allows the housing to transition from a closed sealed state to an open accessible state, enabling easy exchange of substrates or payloads without fixed mechanical constraints.
2Ease of operation
If the housing is made movable to improve access, then ease of operation improves, but maintaining a controlled atmosphere becomes more difficult
Solution Approach 1:
The sealing function is extracted as a separate feature and applied specifically to the interface between the first and second housing members. Sealing members are positioned at this interface to maintain the controlled atmosphere when the housing is closed, while allowing the second housing member to pivot open for access when needed.
Solution Approach 2:
Sealing members are used at the interface between housing members to create a flexible seal that maintains the controlled atmosphere. These sealing members can accommodate the pivotal motion of the second housing member while preventing atmospheric leakage, thus maintaining reliability during both closed and open states.
Data Source
AI summary
A workpiece handling module including a first housing member and a second housing member pivotally movable relative to the first member forming a housing having an access side and a second side opposite the access side and side walls, a first portion of the side walls is carried by the first member and a second portion of the side walls is carried by the second member, and at least one of the first and second housing members includes at least one sealable opening for allowing ingress and egress of workpieces to and from an interior chamber formed by the first and second housing members in a closed configuration, and the second portion of the side walls adjacent the access side and carried by the second member is greater than the first portion of the side walls adjacent the access side and carried by the first member.