Pivoting Annular Gas Delivery for Charged Particle Beam Focusing
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Solution Overview
Problem
Existing particle beam column configurations with integrated gas supply arrangements are inflexible, preventing close focusing lens distances from objects and tilting, which negatively affects the symmetry of electric or magnetic fields and the quality of particle beams and gas supply.
Innovation Solution
A processing system with a first particle beam column and an annular gas supply arrangement that allows the object to tilt relative to the beam column, featuring an annular piping system that pivots independently to maintain constant field symmetry and gas supply parameters, avoiding collisions and ensuring optimal beam focusing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the object is tilted relative to the particle beam column, then the processing system can selectively direct particle beams perpendicular onto the object surface, but the focusing lens cannot maintain small distance from the object while preserving field symmetry
Solution Approach 1:
The gas supply arrangement is designed to be movable relative to the particle beam column, specifically capable of tilting together with the object. This dynamic configuration allows the gas supply arrangement to maintain its functional relationship with the object surface while the object is tilted, and enables the focusing lens to maintain optimal positioning without compromising field symmetry.
Solution Approach 2:
The system separates the gas supply arrangement from the fixed particle beam column structure, allowing the gas supply arrangement to be independently positioned and tilted with the object. This segmentation enables the focusing lens to remain stationary relative to the beam path while the gas supply and object move together, preserving field symmetry.
2Manufacturing precision
If the focusing lens is positioned close to the object, then the particle beam can be tightly focused, but the object cannot be tilted without colliding with the lens or compromising field symmetry
Solution Approach 1:
The gas supply arrangement is designed to move dynamically with the object during tilting operations. This allows the system to maintain close focusing lens-to-object distances for optimal beam focusing while the object and gas supply arrangement tilt together, preventing collisions and maintaining field symmetry.
3Device complexity
If a fixed gas supply arrangement is integrated in the particle beam column, then the system structure is simplified, but the system becomes inflexible and negatively affects field symmetry and processing quality
Solution Approach 1:
The gas supply arrangement is designed to be movable relative to the particle beam column, specifically capable of tilting together with the object. This dynamic configuration provides the flexibility needed for object tilting operations while maintaining a relatively simple integrated structure.
Solution Approach 2:
The gas supply arrangement serves multiple functions: it supplies gas to the interaction region, tilts with the object to maintain proper orientation, and can be positioned to avoid interfering with the particle beam path. This multi-functionality reduces the need for additional separate components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible tilting of objects close to particle beam columns while maintaining symmetrical electric and magnetic fields, ensuring consistent particle beam focusing and gas supply, independent of tilt position, thus improving processing system efficiency.
Implementation Method 1
The gas, which is supplied to the interaction region, may have a function for neutralizing a space charge at the object. The space charge may be caused by the impingement of the particle beam onto the object.
Implementation Method 2
a first particle beam column having a focusing lens for directing a first particle beam along a beam path of the first particle beam onto an interaction region
Implementation Method 3
The annular piping extends annularly around the beam path of the first and/or a second particle beam... One end of the gas supply line may be coupleable to a gas reservoir. The gas supply line opens into the annular piping at a further end of the gas supply line.
Data Source
Figure 1~5
Figure 2
Figure 3~4
AI summary
A processing system, comprising: an annular piping which extends annularly, in particular in the form of a circular annular shape, around a beam path between a focusing lens and an interaction region; wherein the annular piping comprises on a side, which faces the interaction region, a plurality of exit openings for the gas towards the interaction region; and wherein the annular piping comprises a holder, which is configured to pivot the annular piping about a pivot axis, which is parallel to the tilt axis of the object holder.