Pivoting Contact Inspection Device for Semiconductor Testing
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Solution Overview
Problem
Contact inspection devices for semiconductor integrated circuits face issues with cantilever-type and needle-type contacts, where the removal of oxide films during energization tests leads to increased contact resistance, adhesion or fusion-bonding of shavings, and damage to electrodes, resulting in connection failures and reduced durability.
Innovation Solution
A contact inspection device with elastically deformable contacts that pivotally tilt when pressed against the test object, preventing sliding and thus minimizing oxide film removal and electrode damage, while maintaining a stable electrical connection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If needle-type contacts are used to pierce oxide film layers for electrical contact, then electrical connection is established, but contact pressure damages electrodes and oxide film shavings adhere to contacts
Solution Approach 1:
The contact structure is changed from rigid to dynamic by introducing an elastically deformable portion that allows the needle tip portion to pivotally tilt during contact. This dynamic adjustment enables the contact to adapt to surface variations while reducing harmful sliding motions that cause electrode damage and shaving adhesion.
Solution Approach 2:
The contact mechanism changes the motion parameter from linear sliding to pivotal tilting by utilizing the elastic deformation of the elastically deformable portion. This parameter change allows the needle tip to rotate about its contact point with the electrode, minimizing mechanical damage while maintaining electrical connection.
2Reliability
If cantilever-type contacts slide on electrode surfaces to remove oxide films, then electrical contact is established, but large scratch marks are left on electrodes and contact resistance increases
Solution Approach 1:
The contact transitions from a static cantilever structure to a dynamic structure where the needle tip portion can pivotally tilt about the needle tip. This dynamic motion changes the interaction mode from sliding (harmful) to pivotal tilting (beneficial), reducing electrode surface damage while maintaining oxide film removal capability.
Solution Approach 2:
Instead of sliding the contact laterally across the electrode surface to remove oxide films, the invention inverts the approach by using pivotal tilting motion where the needle tip rotates in place. This inverted motion mode achieves oxide film removal through controlled deformation rather than abrasive sliding.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution prevents damage to electrodes and ensures stable electrical connections by pivotally tilting the needle tips, reducing contact resistance and the likelihood of connection failures, and maintaining electrode durability.
Implementation Method 1
an elastically deformable portion provided between the base end portion and the needle tip portion, which is deformable under a compressive force applied in a direction of the axis of the needle tip portion while the needle tip is pressed against the test object
Data Source
AI summary
A contact inspection device including contacts that contact with a test object for inspection, each contact having a base end portion, a needle tip portion having a needle tip that contacts with the test object, and an elastically deformable portion located between the base end portion and the needle tip portion, with the base end portion and the needle tip portion having axes which coincide with each other. The elastically deformable portion is deformable under a compressive force applied in the axial direction of the needle tip portion while the needle tip is pressed against the test object and converts the compressive force into a tilting motion of the needle tip portion about the needle tip through deformation. The needle tip portion is displaceable in a direction in which the needle tip portion is pivotally tilted while the needle tip is pressed against the test object.