Pivoting Liquid Ejection Nozzle for Precise Substrate Edge Etching

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Solution Overview

Problem

Existing substrate processing technologies face challenges in accurately and efficiently ejecting processing liquids to the peripheral edges of substrates, leading to scattering and particle generation due to inadequate control over ejection angles and bubble formation.

Innovation Solution

A processing liquid ejection nozzle with a nozzle main body and angle changing mechanism, allowing for horizontal pivoting and adjustable ejection angles, combined with a nozzle arm and gas ejection nozzle to manage liquid scattering and bubbles, ensuring precise liquid delivery and reduced particle generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the nozzle ejects processing liquid toward the substrate without angle adjustment, then the ejection process is simple, but the processing liquid scatters and fails to accurately reach the peripheral edges of the substrate

Engineering Contradiction:

Improveaccuracy of liquid delivery to substrate peripheral edgesVSAvoidcomplexity of nozzle structure

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The nozzle is designed with a pivoting mechanism that allows the nozzle main body to change its ejection angle dynamically. The connection portion enables the nozzle to pivot relative to the nozzle arm, transforming a static structure into a dynamic one that can adjust its orientation to accurately target the substrate peripheral edges while maintaining manageable structural complexity.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The nozzle is divided into distinct functional segments: the nozzle main body containing the flow path, the connection portion enabling pivoting motion, and the nozzle arm providing support. This segmentation allows each component to perform its specific function independently, achieving precise liquid delivery without requiring the entire structure to be overly complex.

Inventive Principle:

Principle #1Segmentation

2Object-generated harmful factors

If the nozzle maintains a fixed ejection angle, then the device structure is simple, but processing liquid scatters and particles are generated

Engineering Contradiction:

Improveparticle generation from liquid scatteringVSAvoidadjustability of ejection angle

Core Design Contradiction:

Object-generated harmful factorsVSEase of operation

Solution Approach 1:

The pivoting mechanism transforms the fixed-angle nozzle into a dynamic system that can adjust its ejection angle. This dynamic capability allows the nozzle to optimize its orientation for each ejection operation, preventing liquid scattering and the subsequent generation of particles, while the mechanism itself remains relatively simple to operate.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The ejection angle is changed as a controllable parameter through the pivoting mechanism. By adjusting this angular parameter, the system optimizes liquid delivery to prevent scattering and particle generation, demonstrating how parameter adjustment can resolve the contradiction between reducing harmful effects and maintaining operational simplicity.

Inventive Principle:

Principle #35Parameter changes

3Adaptability or versatility

If the nozzle body is long and straight, then the flow path is simple, but the ejection angle cannot be adjusted horizontally

Engineering Contradiction:

Improvehorizontal angle adjustment capabilityVSAvoidnozzle body structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The nozzle is segmented into the nozzle main body and the connection portion. The nozzle main body maintains a relatively simple flow path structure, while the connection portion provides the pivoting functionality. This segmentation achieves horizontal angle adjustment capability without requiring the entire nozzle body to be structurally complex.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The connection portion acts as a pivot joint that enables the nozzle main body to rotate horizontally. This dynamic element adds adaptability for angle adjustment while keeping the nozzle main body structure relatively simple, as the complexity is localized to the connection mechanism rather than the entire nozzle body.

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS11776824B2Processing liquid ejection nozzle, nozzle arm, substrate processing apparatus, and substrate processing method

Publication Date: 2023.10.03 TOKYO ELECTRON LTD

AI summary

A processing liquid ejection nozzle ejects a processing liquid used for a substrate processing. The processing liquid ejection nozzle includes a nozzle main body and an angle changing mechanism. The nozzle main body includes a first main body formed with a first flow path therein which communicates with a processing liquid supply path, and a second main body bent from the first main body and formed with a second flow path therein which communicates with the first flow path. The angle changing mechanism changes an angle of the nozzle main body in a horizontal direction with respect to a fixing member to which the nozzle main body is fixed.