Pivoting Substrate Holder to Prevent Lift-Off Flow Disturbance
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Solution Overview
Problem
Conventional substrate processing apparatuses face issues with the abutting member disturbing the processing solution flow and the resist or metal layers adhering to it, leading to unintended effects during the lift-off process.
Innovation Solution
A substrate processing apparatus with a pivoting member that abuts against the cup's upper or side surface, reducing the distance between the holding portion and the mount, and utilizing centrifugal rotation to drain the processing solution, thereby minimizing interference and adhesion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an abutting member is provided inside the cup to abut against the pivoting member, then the pivoting member can be reliably actuated to hold the substrate, but the abutting member disturbs the flow of the processing solution and causes adhesion of removed layers
Solution Approach 1:
The invention extracts and removes the abutting member from the cup structure. Instead of having a separate abutting member inside the cup, the pivoting member itself is designed with an abutting portion that directly abuts against the inner wall of the cup. This eliminates the harmful abutting member while maintaining the necessary actuation function.
Solution Approach 2:
The invention merges the abutting function into the pivoting member structure. The abutting portion is integrated as part of the pivoting member, combining the pivoting function and the abutting function into a single component. This eliminates the need for a separate abutting member that would disturb the processing solution.
2Manufacturing precision
If the abutting member is positioned to effectively actuate the pivoting member, then the substrate holding is reliable, but the removed resist layer and metal layer adhere to the abutting member causing unintended effects
Solution Approach 1:
The invention removes the abutting member entirely from the system. By eliminating this component, the source of adhesion problems is completely removed. The pivoting member's own structure provides the necessary abutting action without creating harmful adhesion effects.
3Ease of operation
If a separate abutting member is provided inside the cup, then the pivoting member can be effectively actuated, but the apparatus complexity increases and the processing solution flow is disturbed
Solution Approach 1:
The invention combines the abutting function with the pivoting member structure. The abutting portion is integrated into the pivoting member, eliminating the need for a separate abutting member. This simplifies the apparatus structure while maintaining effective pivoting member actuation.
Solution Approach 2:
The invention extracts and eliminates the separate abutting member from the apparatus. By removing this component, the overall apparatus complexity is reduced while the essential actuation function is maintained through the integrated abutting portion of the pivoting member.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces unintended effects on the substrate processing, prevents disturbance of the processing solution flow, and avoids adhesion of removed layers to the abutting member, simplifying the apparatus and improving process efficiency.
Implementation Method 1
the cup rotates about the lifting shaft to drain the processing solution outward in the radial direction
Data Source
AI summary
A substrate processing apparatus A1 includes: cup 1 for storing processing solution 92 to process substrate 91; stage 2 to be raised and lowered along lifting shaft 31 extending in vertical direction z in cup 1; mount 4 provided on stage 2 to mount substrate 91; and pivoting member 5 attached to mount 4 such that pivoting member 5 is pivotable about pivoting shaft 51 provided along circumferential direction 6 centered at lifting shaft 31. Pivoting member 5 includes holding portion 52 located inward of pivoting shaft 51 in radial direction r, and abutting portion 53 located outward of pivoting shaft 51 in radial direction r. As stage 2 is lowered, abutting portion 53 abuts against cup 1 to cause pivoting of pivoting member 5, thereby reducing a distance between holding portion 52 and mount 4 with substrate 91 therebetween. These configurations reduce unintended effects in processing substrate 91.