Pixel Electrode Layout Using Halftone Mask Photolithography
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Solution Overview
Problem
Current display device manufacturing processes are costly and complex due to the separate formation of contact electrodes, which increases the overall process steps and costs.
Innovation Solution
A pixel design where contact electrodes are formed in a single process using a halftone mask, with a photosensitive material applied and etched to create the electrodes and encapsulation layers, reducing the number of process steps and costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If contact electrodes are formed in separate processes, then manufacturing precision is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent merges the formation of multiple contact electrodes into a single photolithography process. A photosensitive material layer is applied over the light emitting element, and a single exposure and development process creates patterns that define multiple contact electrodes simultaneously. This combining of operations reduces process complexity while maintaining precision through the photolithography technique.
Solution Approach 2:
The photosensitive material layer serves multiple functions: it acts as a mask for defining contact electrode positions, as an etching mask for pattern transfer, and as a structural element that becomes part of the final device. This multi-functionality reduces the number of separate process steps needed while maintaining manufacturing precision.
2Manufacturing precision
If contact electrodes are formed in separate processes, then manufacturing precision is improved, but manufacturing cost increases
Solution Approach 1:
The patent combines multiple contact electrode formation operations into a single photolithography cycle, reducing the number of process steps, equipment usage, and material consumption. This merging directly lowers manufacturing cost while maintaining precision through the established photolithography process.
Solution Approach 2:
The photosensitive material layer is used as a temporary etching mask during the contact electrode formation process and is then removed (discarded) after serving its purpose. This approach avoids the need for separate mask layers and simplifies the overall manufacturing process, reducing cost.
3Device complexity
If contact electrodes are formed in a single process, then manufacturing cost and process complexity are reduced, but manufacturing precision may worsen
Solution Approach 1:
The patent replaces multiple mechanical alignment and deposition operations with a single photolithography process that uses light patterns to define electrode positions. This substitution maintains precision through optical patterning while simplifying the mechanical complexity of the manufacturing process.
Solution Approach 2:
The photolithography process parameters (exposure time, development conditions, photoresist composition) are optimized to achieve the required precision for multiple contact electrodes in a single process. By controlling these parameters, the patent maintains manufacturing precision while reducing process complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the manufacturing process, reduces costs, and facilitates easier formation of contact electrodes, leading to a more efficient and cost-effective display device production.
Implementation Method 1
an encapsulation layer including a photosensitive material
Data Source
AI summary
A pixel includes a first insulating film disposed on a substrate, a light emitting element disposed on the first insulating film, a second insulating film disposed on the light emitting element to cover at least a portion of the light emitting element, a first contact electrode and a second contact electrode, each of the first and second contact electrodes including at least a portion disposed on the first insulating film and connected to the light emitting element, and an encapsulation layer including a photosensitive material.