Pixel Electrode Rough Face via Plasma Treatment
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Solution Overview
Problem
The integration of a black matrix on an array substrate in display devices, while reducing light leakage, causes light reflection from via holes between drain and pixel electrodes, degrading the display effect due to the exposure of the drain electrode.
Innovation Solution
A surface treatment of the pixel electrode at the via hole is performed to create a rough face, using plasma such as hydrogen or silane plasma, to reduce light transmittance and reflection, ensuring the drain electrode is shaded effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a via hole is formed in the black matrix to achieve electrical connection between drain electrode and pixel electrode, then electrical connection is enabled, but light reflection from the drain electrode occurs through the via hole
Solution Approach 1:
The patent introduces an intermediary substance (black filler material) into the via hole to mediate between the electrical connection requirement and the light reflection problem. The black filler serves as a mediator that allows electrical conductivity while simultaneously absorbing light to prevent reflection from the drain electrode.
Solution Approach 2:
The patent converts the harmful effect of light reflection by filling the via hole with black material that absorbs light. The via hole, which initially causes light reflection harm, is transformed into a beneficial structure that maintains electrical connection while preventing light leakage through the application of black filler material.
2Manufacturing precision
If the width of the black matrix is decreased to enhance resolution and transmittance, then display quality is improved, but the shading effect on gate lines and data lines may be insufficient
Solution Approach 1:
The patent addresses the shading effect by extending the black matrix in the vertical dimension (thickness direction) through the formation of via holes filled with black material. This dimensional extension allows the black matrix to maintain adequate shading coverage even when the horizontal width is reduced for higher resolution.
Solution Approach 2:
The black matrix is segmented into multiple parts: the main black matrix layer and the vertical extensions through via holes. This segmentation allows the black matrix to fulfill dual functions of maintaining thin profile for high transmittance while providing sufficient shading through vertical extensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The treatment of the pixel electrode surface at the via hole reduces light reflection and enhances the display effect by minimizing light contact with the drain electrode, thereby improving the overall display performance.
Implementation Method 1
A surface treatment of the pixel electrode at the via hole is performed to create a rough face, using plasma such as hydrogen or silane plasma
Data Source
AI summary
An array substrate and manufacturing method thereof, and a display device are capable of preventing light reflection from a drain electrode, and guaranteeing the display effect of the display device. The array substrate includes a drain electrode of a thin film transistor unit, an insulating layer and a pixel electrode. The insulating layer is located between the drain electrode and the pixel electrode, and has a via hole formed therein, and the drain electrode and the pixel electrode are connected through the via hole. A surface of the pixel electrode at the via hole is a rough face.


