Double-Layer Pixel Electrode Plasma Treatment for Indium Precipitation
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Solution Overview
Problem
In-plane switching (IPS) mode liquid crystal displays face issues with haziness in images due to indium precipitation on the pixel electrode during plasma treatment, leading to reduced transmittance and display quality.
Innovation Solution
A display apparatus is designed with a double-layer pixel electrode structure where the first pixel electrode contains indium and the second pixel electrode does not, and both are plasma-treated using hydrogen or hydrogen-nitrogen plasma to prevent indium precipitation, along with a protective silicon nitride layer to enhance transmittance and prevent haziness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If plasma treatment is applied to the pixel electrode containing indium, then the pixel electrode is cleaned and activated, but indium precipitates on the pixel electrode causing haziness and reduced transmittance
Solution Approach 1:
The harmful indium element is extracted and removed from the pixel electrode by applying a cleaning solution treatment. This removes the precipitated indium that causes haziness while preserving the functional indium in the conductive oxide layer, thereby eliminating the harmful effect without sacrificing the transmittance enhancement provided by indium-containing materials.
Solution Approach 2:
The patent employs a controlled plasma treatment environment that prevents indium precipitation. By using specific plasma conditions (inert or controlled atmosphere), the treatment activates and cleans the pixel electrode surface without causing indium to precipitate and form haziness, thus maintaining high transmittance.
2Illumination intensity
If a single-layer pixel electrode with indium is used, then transmittance is enhanced, but indium precipitation during plasma treatment causes display quality degradation
Solution Approach 1:
The pixel electrode is segmented into multiple functional layers: an indium-containing transparent conductive oxide layer for high transmittance, and additional layers (such as protective layers or additional conductive layers) that prevent indium precipitation during plasma treatment. This segmentation allows each layer to perform its specific function, maintaining both high transmittance and display quality reliability.
Solution Approach 2:
The patent uses composite material structures for the pixel electrode, combining indium-containing transparent conductive oxide with other materials that prevent indium precipitation. This composite structure maintains the transmittance benefits of indium while the additional materials provide protection against precipitation during plasma treatment, ensuring display quality.
3Productivity
If plasma treatment parameters are increased to improve cleaning efficiency, then the cleaning effect is enhanced, but indium precipitation is accelerated
Solution Approach 1:
The patent optimizes plasma treatment parameters (power, pressure, gas composition, treatment time) to achieve effective cleaning and activation without exceeding the threshold that causes indium precipitation. By carefully controlling these parameters, the cleaning efficiency is maximized while preventing the harmful precipitation effect.
Solution Approach 2:
The plasma treatment is applied in controlled periodic cycles with specific durations and intervals. This periodic application allows sufficient cleaning and activation time while preventing prolonged exposure that would accelerate indium precipitation, thus balancing cleaning efficiency with prevention of haziness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents indium precipitation, maintaining high transmittance and improving display quality by avoiding defects that cause haziness in images.
Implementation Method 1
The first insulating substrate is plasma-treated with a plasma containing a hydrogen source or a plasma containing a hydrogen and nitrogen source
Data Source
AI summary
A display apparatus includes a first insulating substrate on which pixels are arranged and a second insulating substrate facing the first insulating substrate. Each pixel includes a gate electrode disposed on the first insulating substrate, a gate insulating layer disposed on the first insulating substrate to cover the gate electrode, a semiconductor pattern disposed on the gate insulating layer to overlap with the gate electrode, a source electrode and a drain electrode disposed on the semiconductor pattern, a transparent pixel electrode disposed on the gate insulating layer and partially making contact with the drain electrode, a protective layer disposed on the pixel electrode, and a common electrode disposed on the first insulating substrate or the second insulating substrate to form an electric field together with the pixel electrode.