Pixel Isolation Structure With Open Region for AF Contrast

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Solution Overview

Problem

Current image sensors face challenges in improving auto focusing (AF) contrast characteristics and dark current characteristics, particularly in the design of device isolation structures within the pixel array, which affect the overall performance and reliability of the image sensor.

Innovation Solution

The image sensor incorporates a device isolation structure with an open region between the first and second photoelectric conversion devices, allowing for improved movement of photocharges and application of a negative voltage to enhance AF contrast and reduce dark current, while also using microlenses and a semiconductor substrate with a device isolation structure that is continuous and physically connected for efficient charge management.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a device isolation structure is used to separate pixels and photoelectric conversion devices, then dark current is reduced and photocharge movement is limited, but AF contrast characteristics deteriorate due to restricted photocharge movement between devices

Engineering Contradiction:
Improvedark current reductionVSAvoidAF contrast characteristics
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The device isolation structure is designed with different properties in different regions: it has an open region (lower isolation) between the first and second photoelectric conversion devices to allow photocharge movement for AF contrast, and closed regions (higher isolation) between adjacent pixels to prevent dark current and photocharge leakage. This local differentiation resolves the contradiction by providing selective isolation levels where needed.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If the device isolation structure is continuous across the pixel array, then manufacturing precision is improved and photocharge containment is enhanced, but flexibility in optimizing individual pixel performance is reduced

Engineering Contradiction:
Improvephotocharge containmentVSAvoidpixel performance optimization
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The continuous device isolation structure is segmented into multiple regions with different configurations: open regions between photoelectric conversion devices within pixels, and closed regions between adjacent pixels. This segmentation allows the structure to simultaneously provide overall photocharge containment while enabling localized performance optimization for AF functionality.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances AF contrast characteristics and improves the reliability of the image sensor by limiting photocharge movement and reducing dark current, leading to better image capture performance.

Implementation Method 1

the device isolation structure opening a part between the first photoelectric conversion device and the second photoelectric conversion device, including an open region

Methodology Applied
Scientific EffectPhotocharge movement limitation:

Implementation Method 2

application of a negative voltage to enhance AF contrast and reduce dark current

Methodology Applied
Scientific EffectDark current reduction:

Implementation Method 3

microlenses on the first photoelectric conversion device and the second photoelectric conversion device

Methodology Applied
Scientific EffectLight focusing: Lens

Implementation Method 4

a first photoelectric conversion device and a second photoelectric conversion device inside the semiconductor substrate and included in each of the plurality of pixels

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS20240321921A1Image sensor including device isolation structure
Publication Date: 2024.09.26 SAMSUNG ELECTRONICS CO LTD
  • US20240321921A1 patent drawing
  • US20240321921A1 patent drawing
  • US20240321921A1 patent drawing

AI summary

Provided is an image sensor including a device isolation structure. The image sensor includes a semiconductor substrate including a pixel array including a plurality of pixels, a first photoelectric conversion device and a second photoelectric conversion device inside the semiconductor substrate and included in each of the plurality of pixels, microlenses on the first photoelectric conversion device and the second photoelectric conversion device and a device isolation structure between the plurality of pixels and between the first photoelectric conversion device and the second photoelectric conversion device, the device isolation structure opening a part between the first photoelectric conversion device and the second photoelectric conversion device, including an open region at each edge of the plurality of pixels, and may be continuous in the pixel array.