Pixel Isolation Layout With Open Regions for Autofocus Image Sensors

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Solution Overview

Problem

Existing image sensors face challenges in maintaining light-sensing sensitivity due to isolation layers, which can reduce the linearity of full wells and affect auto focusing and distance measurement capabilities.

Innovation Solution

Incorporating a second isolation layer with open regions between pixel regions, along with a passivation layer doped with P-type impurities, to improve light-receiving efficiency and linearity, while preventing light scattering and enhancing auto focusing and distance measurement functions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an isolation layer is used to separate pixel regions, then pixel isolation is improved, but light-sensing sensitivity deteriorates

Engineering Contradiction:
Improvepixel isolationVSAvoidlight-sensing sensitivity
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The isolation layer is designed with different properties in different regions: it has insulating properties where needed for pixel separation, but includes light-transmitting open regions where light sensing is required. This local differentiation allows the same structure to provide both isolation and light transmission functions.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The isolation layer is segmented into multiple regions including continuous isolation portions and open regions. This segmentation allows the isolation layer to provide electrical isolation between pixels while maintaining light transmission paths through the open regions to the photoelectric conversion devices.

Inventive Principle:
Principle #1Segmentation

2Reliability

If an isolation layer is used to separate pixel regions, then pixel isolation is improved, but linearity of full wells deteriorates

Engineering Contradiction:
Improvepixel isolationVSAvoidlinearity of full wells
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The isolation layer provides strong isolation in regions between pixels while maintaining open regions that allow uniform light distribution across the photoelectric conversion devices, thereby preserving the linearity of full wells through localized functional differentiation.

Inventive Principle:
Principle #3Local quality

3Reliability

If an isolation layer is used to separate pixel regions, then pixel isolation is improved, but auto focusing capability deteriorates

Engineering Contradiction:
Improvepixel isolationVSAvoidauto focusing capability
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The isolation layer is segmented to provide both isolation and light transmission functions, with open regions allowing light to reach photoelectric conversion devices for phase difference detection, thereby maintaining auto focusing capability while providing pixel isolation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The open regions in the isolation layer act as intermediaries that allow light to pass through to the photoelectric conversion devices, enabling phase difference detection for auto focusing while the isolation layer itself maintains pixel separation.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Reliability

If an isolation layer is used to separate pixel regions, then pixel isolation is improved, but distance measurement capability deteriorates

Engineering Contradiction:
Improvepixel isolationVSAvoiddistance measurement capability
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The isolation layer is segmented into isolation portions and open regions, where the open regions allow light transmission necessary for distance measurement while the isolation portions maintain pixel separation, thus preserving both functions simultaneously.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The isolation layer exhibits different optical properties in different locations: it is opaque in isolation regions for pixel separation but transparent in open regions to allow light transmission for distance measurement by the photoelectric conversion devices.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively enhances light-sensing sensitivity, improves linearity of full wells, and maintains the accuracy of auto focusing and distance measurement functions in image sensors.

Implementation Method 1

a passivation layer doped with P-type impurities

Methodology Applied
Scientific EffectP-type doping: Dopants

Implementation Method 2

Each of the first pixel region and the second pixel region include a photoelectric conversion device

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS12113084B2Image sensor
Publication Date: 2024.10.08 SAMSUNG ELECTRONICS CO LTD
  • US12113084B2 patent drawing
  • US12113084B2 patent drawing
  • US12113084B2 patent drawing

AI summary

An image sensor is provided. The image sensor includes a first pixel region and a second pixel region located within a semiconductor substrate, a first isolation layer surrounding the first pixel region and the second pixel region, a second isolation layer located between the first pixel region and the second pixel region, and a microlens arranged on the first pixel region and the second pixel region. Each of the first pixel region and the second pixel region include a photoelectric conversion device. The second isolation layer includes at least one first open region that exposes a portion of an area located between the first pixel region and the second pixel region.