Pixel Sensor Blocking Layer Tuning via Electrochromic Oxidation

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Solution Overview

Problem

The sensitivity of pixel arrays in digital cameras to different wavelengths of light depends on the transmittance of the blocking layer, which requires modifying fabrication processes for various use cases, leading to manufacturing inefficiencies, downtime, and resource wastage.

Innovation Solution

An electrode is used to control the oxidation of a blocking layer over a photodiode, allowing for adjustment of transmittance by applying different voltages, enabling production of pixel sensors for different uses within a single manufacturing process, thereby conserving resources and reducing production time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If fabrication processes are modified to adjust blocking layer transmittance for different use cases, then pixel sensor sensitivity to different wavelengths is improved, but manufacturing efficiency deteriorates due to process switching, downtime, and resource wastage

Engineering Contradiction:
Improvepixel sensor sensitivity adjustmentVSAvoidmanufacturing efficiency
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent applies parameter changes by modifying the oxidation state of the blocking layer through electrochemical control. By adjusting the oxidation parameter (via voltage application), the transmittance of the blocking layer is tuned to different wavelengths, enabling multiple sensitivity profiles from a single fabrication process. This resolves the contradiction by achieving adaptability without process switching.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements universality by creating a single fabrication process that can produce pixel sensors with different wavelength sensitivities through post-fabrication electrochemical tuning. The blocking layer serves multiple functions (optical filtering and electrochemical actuation), and the fabrication line handles all sensor types universally without reconfiguration, eliminating downtime and resource wastage associated with process switching.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If fabrication processes are switched for different use cases, then transmittance adjustment is achieved, but production time increases due to downtime between process switches

Engineering Contradiction:
Improvetransmittance adjustment capabilityVSAvoidproduction downtime
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The patent applies preliminary action by incorporating the electrochemical tuning capability directly into the fabrication process design. The blocking layer is prepared during fabrication with built-in electrochemical actuation structures, enabling post-fabrication tuning without requiring separate process steps. This eliminates production downtime by preparing the sensor for future tuning during the initial fabrication run.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements dynamics by transitioning from static fabrication processes to dynamic, post-fabrication electrochemical tuning. The blocking layer's transmittance is no longer fixed during fabrication but can be dynamically adjusted after fabrication through voltage application, enabling flexible adaptation without time-consuming process switches.

Inventive Principle:
Principle #15Dynamics

3Adaptability or versatility

If fabrication processes are modified for different use cases, then sensitivity requirements are met, but resource consumption increases due to repeated process operations

Engineering Contradiction:
Improvesensitivity customizationVSAvoidmanufacturing resource wastage
Core Design Contradiction:
Adaptability or versatilityVSLoss of substance

Solution Approach 1:

The patent applies universality by creating a single, unified fabrication process that produces all sensor types through post-fabrication electrochemical tuning rather than requiring separate fabrication lines for different sensitivities. This eliminates resource wastage from repeated process operations, tooling changes, and material consumption associated with multiple fabrication processes.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent implements parameter changes by using electrochemical oxidation state as the controlling parameter for transmittance adjustment. Instead of modifying physical fabrication parameters (temperature, pressure, material composition) for different use cases, the invention changes the chemical oxidation parameter post-fabrication, conserving manufacturing resources while achieving sensitivity customization.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the production of pixel sensors with adjustable sensitivity without switching manufacturing processes, conserving power, processing resources, and eliminating downtime, thus enhancing manufacturing efficiency.

Implementation Method 1

An electrode is used to control the oxidation of a blocking layer over a photodiode, allowing for adjustment of transmittance by applying different voltages

Methodology Applied
Scientific EffectElectrochromism: Electrochromism

Data Source

PatentUS11978751B1Pixel sensors and methods of forming the same
Publication Date: 2024.05.07 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11978751B1 patent drawing
  • US11978751B1 patent drawing
  • US11978751B1 patent drawing

AI summary

An electrode controls transmittance of a blocking layer over a photodiode of a pixel sensor (e.g., a photodiode of a small pixel detector) by changing oxidation of a metal material included in the blocking layer. By using the electrode to adjust transmittance of the blocking layer, pixel sensors for different uses and/or products may be produced using a single manufacturing process. As a result, power and processing resources are conserved that otherwise would have been expended in switching manufacturing processes. Additionally, production time is decreased (e.g., by eliminating downtime that would otherwise have been used to reconfigure fabrication machines.