Light Sensor Pixel Separation Structure for Noise Coupling Suppression
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Solution Overview
Problem
A capacitive coupling of parasitic capacitance occurs in light detection apparatuses with embedded separation regions, leading to deterioration in image quality.
Innovation Solution
The light detection apparatus includes a semiconductor layer with photoelectric conversion regions partitioned by a separation region that contains a conductor stretching in the thickness direction, which is electrically connected to a transparent electrode on the opposite surface of the semiconductor layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an embedded separation region with silicon oxide film is used to partition photoelectric conversion regions, then the photoelectric conversion regions are effectively separated, but parasitic capacitance coupling occurs between adjacent regions leading to image quality deterioration
Solution Approach 1:
A conductor layer is introduced as an intermediary element within the separation region, electrically connected to a transparent electrode. This intermediary structure actively manages and suppresses parasitic capacitance coupling between adjacent photoelectric conversion regions, preventing noise propagation while maintaining effective region separation
Solution Approach 2:
The electrical parameters of the separation region are changed by introducing a conductive material with specific electrical properties. The conductor layer, having different electrical conductivity compared to the insulating silicon oxide film, modifies the electrical characteristics of the separation region to reduce parasitic capacitance effects
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses the propagation of noise between amplifying transistors, thereby improving image quality and enhancing the reliability of the light detection apparatus.
Implementation Method 1
A capacitive coupling of a parasitic capacitance occurs even in a light detection apparatus in which a photoelectric conversion region is partitioned by an embedded separation region
Data Source
AI summary
To provide a technique for improving image quality. A light detection apparatus includes: a semiconductor layer including a first surface and a second surface mutually positioned on opposite sides in a thickness direction; a plurality of photoelectric conversion regions provided on the semiconductor layer so as to be adjacent to each other via a separation region that stretches in the thickness direction of the semiconductor layer; a transistor provided for each of the photoelectric conversion regions on the side of the first surface of the semiconductor layer; and a transparent electrode which is provided on the side of the second surface of the semiconductor layer and to which a potential is applied. In addition, the separation region includes a conductor which stretches in the thickness direction of the semiconductor layer and the conductor is electrically connected on the side of the second surface of the semiconductor layer to the transparent electrode.