Imaging Apparatus Pixel Size Adjustment for Multi-Pitch Array Inspection
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Solution Overview
Problem
Conventional imaging apparatus struggle to inspect multiple array regions on semiconductor wafers or reticles with different cell sizes simultaneously, leading to compromised throughput and defect detection sensitivity due to the need for multiple imaging scans and digital interpolation.
Innovation Solution
Selecting an optimal pixel size that allows for grouped cells with an integer number of pixels across all array regions, reducing the need for digital interpolation and maintaining high throughput by adjusting the pixel size through optical zoom, and determining this optimal size using the largest common divider and adjustable range considerations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple imaging scans are performed to inspect array regions with different cell sizes, then inspection coverage is improved, but throughput is reduced
Solution Approach 1:
The system dynamically adjusts the pixel size parameter of the imaging apparatus to match different array region specifications. By changing the pixel size within an optimal range, the system can inspect multiple array regions with different cell sizes using a single imaging scan, thereby maintaining high throughput while ensuring complete inspection coverage.
Solution Approach 2:
The imaging apparatus incorporates dynamic pixel size adjustment capability, allowing the system to adapt to different array region requirements in real-time. This dynamic parameter adjustment enables the system to handle variable array configurations without requiring multiple separate scanning operations.
2Measurement precision
If digital interpolation is used to handle non-integer cell sizes, then inspection capability is improved, but noise increases and sensitivity decreases
Solution Approach 1:
The system adjusts the pixel size parameter to achieve an optimal match with array cell sizes, minimizing the need for digital interpolation. By selecting pixel sizes from an optimal range that produces integer or near-integer relationships with cell dimensions, the system maintains high defect detection sensitivity while avoiding the noise amplification associated with extensive interpolation.
3Measurement precision
If pixel size is adjusted to match specific array region sizes, then measurement precision is improved, but adaptability to different array configurations is reduced
Solution Approach 1:
The system maintains an optimal pixel size range rather than a fixed pixel size, allowing flexible adaptation to different array configurations. Within this range, the system can select appropriate pixel sizes for different array regions while maintaining measurement precision, thereby achieving both precision and adaptability.
Solution Approach 2:
The imaging apparatus is designed with multi-functional capability to handle various array region configurations using a single imaging scan. The pixel size adjustment mechanism provides universal applicability across different array types, eliminating the need for specialized scanning procedures for each array configuration.
4Measurement precision
If multiple separate imaging scans are used for different array regions, then inspection accuracy is maintained, but inspection time increases
Solution Approach 1:
The system merges multiple imaging scans into a single comprehensive scan by dynamically adjusting the pixel size to accommodate all array regions simultaneously. This consolidation maintains inspection accuracy for all array regions while significantly reducing the total inspection time required.
Solution Approach 2:
The system performs continuous inspection of all array regions in a single uninterrupted imaging scan. By eliminating the need to switch between multiple scanning operations, the system maintains continuous useful action throughout the inspection process, thereby reducing inspection time while preserving accuracy.
Data Source
AI summary
One embodiment relates to a method of automatically inspecting multiple array regions (102) simultaneously using an imaging apparatus (302). The method includes selecting (211 or 212) an optimal pixel size such that each array region in the multiple array regions has a grouped cell which is an integer number of pixels in size, and adjusting a pixel size of the imaging apparatus to be the selected optimal pixel size. Optimal pixel sizes within an available range of pixel sizes may be determined by finding (202) a largest common divider of cell sizes of the multiple array regions when the cell sizes are expressed in integers. Pre-set criteria may be applied to determine (208) which, if any, of the optimal pixel sizes are acceptable based on pre-set criteria. If none of the optimal pixel sizes are acceptable, then one of the array regions may be marked for digital interpolation (see 216). Other embodiments, aspects, and features are also disclosed.