Pixelated Diffractometer for Multi-Layer Material Analysis

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Diffractometry methods face challenges in achieving both high sensitivity and energy resolution without increasing manufacturing costs or device size, particularly when analyzing samples with multiple layers, as improving sensitivity through a larger detection collimator aperture leads to increased risk of material overlap and complex spectrum interpretation.

Innovation Solution

The method involves recalibrating energy spectra to momentum transfer spectra using the formula x = sin(θi/2)λ = E sin(θi/2)hc, allowing for simple combination of spectra from different pixels and forming groups based on significant variations in local maxima positions, thereby enhancing sensitivity and energy resolution while maintaining a compact device.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the detection collimator aperture is increased to improve sensitivity, then the sensitivity is improved, but the risk of material overlap increases and spectrum interpretation becomes complex

Engineering Contradiction:
ImprovesensitivityVSAvoidspectrum interpretation complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The detection collimator is divided into multiple independent detection elements or channels, each with a smaller aperture. This segmentation allows each element to maintain good energy resolution while the collective array provides enhanced sensitivity through increased solid angle coverage, resolving the contradiction between sensitivity and spectral clarity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The detection system transitions from a single collimator aperture to a two-dimensional array of detection elements. This dimensional expansion allows the system to collect more photons (improved sensitivity) while maintaining individual element resolution through spatial separation, preventing material overlap confusion.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If the detection collimator aperture is increased to improve sensitivity, then the sensitivity is improved, but the energy resolution deteriorates

Engineering Contradiction:
ImprovesensitivityVSAvoidenergy resolution
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The detection collimator is segmented into multiple smaller detection elements, each maintaining a limited aperture angle that preserves energy resolution. The collective array of these segmented elements achieves higher sensitivity through increased solid angle coverage without sacrificing the resolution capabilities of individual elements.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each detection element within the collimator array is assigned a specific local detection function with controlled aperture characteristics. This local quality control ensures that each element maintains appropriate energy resolution for its specific detection zone, while the overall system achieves enhanced sensitivity through the combined contribution of all elements.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables sensitive and accurate analysis of multi-material samples by improving energy resolution and separating diffraction peaks, facilitating the identification of materials without material overlap confusion and maintaining cost-effectiveness.

Implementation Method 1

elastically scattered electromagnetic waves interfere with each other to give coherent crystal-scale scattering

Methodology Applied
Scientific EffectElastic scattering: Scattering

Implementation Method 2

spectrometric measurement means, able to measure an energy released by each interaction of a photon with the detector material

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 3

constructive interferences are identified by the appearance of diffraction peaks (or Bragg peaks) in the radiation scattered by a material

Methodology Applied
Scientific EffectBragg diffraction: Bragg Diffraction

Implementation Method 4

elastically scattered electromagnetic waves interfere with each other to give coherent crystal-scale scattering

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentEP2898315B1Diffractometry-based analysis method and associated diffractometer, particularly suitable for samples comprising multiple layers of materials
Publication Date: 2017.04.26 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP2898315B1 patent drawingFigure 1
  • EP2898315B1 patent drawingFigure 2
  • EP2898315B1 patent drawingFigure 3~4b

AI summary

The invention relates to a method and device for the analysis of a sample of materials (100) by means of diffractometry, in which: a diffractometer is used, said diffractometer including a collimated source (1), a spectrometric detector (3) and a detection collimator (4); and the sample (100) is irradiated with the incident beam. The invention is characterised in that: the detector (3) is a pixelated detector, the detection plane (31) comprising multiple physical or virtual pixels; a measured energy spectrum is established for each pixel (Pi); each measured energy spectrum Si(E) is readjusted, said spectrum being expressed as a function of a variable taking account of the energy of the scattered radiation and the angle of diffraction θi; the fulfillment of at least one criterion, known as the multiple material criterion, is verified, said criterion being representative of the presence of multiple layers of materials; groups of pixels are formed using the results from the preceding verification step, each group corresponding to a layer of material and different groups corresponding to different layers of material; and the spectra are combined by group, during which, for each group, the readjusted spectra obtained for the pixels (Pi) of the group are combined.