Placement Member Seal Section Surface Roughness Control
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Solution Overview
Problem
Existing placement members for semiconductor and liquid crystal display manufacturing experience leakage issues due to high surface roughness of the seal section, leading to reduced vacuum suction force and treatment accuracy.
Innovation Solution
A placement member with a base having projections and an annular protrusion, coated with a film having different thickness regions to reduce surface roughness and minimize leakage, featuring a ceramic or metal base with a coating film that coats the projections and annular protrusion to create a seal section with reduced fluid passage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a seal section is formed with a large surface roughness, then it is easier to manufacture, but leakage occurs and vacuum suction force decreases
Solution Approach 1:
The patent applies parameter changes by modifying the surface roughness parameter of the seal section from large to small (Ra 0.03μm or less). This is achieved through specific manufacturing processes that control the surface finish during projection formation, transforming the seal section's surface characteristics to eliminate leakage while maintaining manufacturing feasibility through standardized processes.
Solution Approach 2:
The patent applies local quality by creating different surface roughness characteristics in different regions. The seal section has a specifically controlled smooth surface (Ra 0.03μm or less) while other portions of the projections may have different surface properties. This localized surface quality optimization ensures sealing reliability at the critical seal section without compromising overall manufacturing ease.
2Ease of manufacture
If the seal section has large irregularities, then manufacturing is simpler, but sites separated from the sample are generated and leakage occurs
Solution Approach 1:
The patent changes the surface roughness parameter to Ra 0.03μm or less, transforming the seal section's surface characteristics from irregular to smooth. This parameter optimization eliminates separated sites and leakage while maintaining manufacturing simplicity through controlled formation processes that achieve the required surface finish.
Solution Approach 2:
The patent applies preliminary action by pre-controlling the surface roughness during the projection formation process itself, rather than requiring subsequent separate finishing operations. The projections are formed with the appropriate smooth surface (Ra 0.03μm or less) as an inherent characteristic of the formation process, ensuring sealing precision before assembly occurs.
3Stress or pressure
If outside air is sucked into the vacuum suction section, then the negative pressure decreases, but the suction force for the sample is lowered
Solution Approach 1:
The patent converts the potential harm of surface irregularities causing leakage into benefit by deliberately creating a controlled smooth surface (Ra 0.03μm or less) on the seal section. This controlled surface characteristic prevents outside air from being sucked in, maintaining negative pressure and ensuring sufficient suction force for secure sample placement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces surface roughness and leakage, enhancing the vacuum suction force and treatment accuracy by creating a seal section with improved fluid sealing and minimal contact with the object, thus maintaining the flatness and precision required in semiconductor and liquid crystal display manufacturing.
Implementation Method 1
a coating film that coats at least a part of the placement section
Data Source
AI summary
A placement member (1) in accordance with an embodiment of the present invention includes a base (4) having a placement section (3) on which an object (2) is placed, and a coating film (5) that coats at least a part of the placement section (3). The placement section (3) has a bottom face (8), a plurality of projections (9) projecting from the bottom face (8), and an annular protrusion (10) that protrudes from the bottom face (8) at the same height as the plurality of projections (9) and surrounds the plurality of projections (9). The coating film (5) has a first region (15) that coats top faces (11) of the projections (9) and a second region (16) that coats a top face (13) of the annular protrusion (10) and has a smaller thickness than that of the first region (15).