Placing Table Structure for Focus Ring Temperature Separation

A support member is introduced as an intermediary component between the heater electrode and the focus ring. The support member has a thermal conductivity lower than that of the focus ring, allowing it to block heat transfer from the heater electrode to the workpiece while still enabling the focus ring to be heated to the required temperature. This resolves the contradiction by protecting the adhesive from excessive heat while maintaining effective focus ring heating.

The thermal conductivity parameter of the support member is specifically selected to be lower than that of the focus ring. This parameter change creates a thermal barrier that prevents heat from reaching the adhesive layer, thereby protecting it from deterioration while allowing the focus ring to achieve the necessary temperature for processing.

The support member serves as a thermal mediator that allows controlled heat transfer. Its lower thermal conductivity creates a gradient that enables the heater electrode to operate at high calorific values for efficient processing while preventing excessive heat from reaching the adhesive and workpiece, thereby reducing thermal stress and preventing adhesive deterioration.

The support member creates a localized thermal environment where the focus ring can be heated to high temperatures for efficient processing, while the adhesive region remains protected at lower temperatures. This local differentiation of thermal conditions allows high productivity without the harmful effects of widespread thermal stress.