Multi-Coil Planar Actuator for Accurate Vacuum Positioning
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Solution Overview
Problem
Existing actuator devices for high-tech vacuum systems face challenges in minimizing vibrations, heat dissipation, eddy-current effects, and implementing stable control systems while achieving high accuracy and multiple degrees of freedom motion and position control.
Innovation Solution
A single design actuator device with multiple groups of coil assemblies, including U-core and permanent magnet Lorentz actuators, integrated in a carrier with recesses for precise motion and position control, and thermal management through coolant channels and temperature sensors, allowing both direct and dual motion axis control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If magnetic coil assemblies are implemented as actuators for displacement and positioning, then vibration-free operation and contactless support are achieved, but heat dissipation in the coils increases and eddy-current effects occur
Solution Approach 1:
The actuator device is divided into multiple independent coil assemblies (first group, second group, third group) that can be individually controlled and positioned. Each coil assembly operates independently to generate magnetic fields for positioning the carrier, allowing distributed heat management and reduced eddy-current effects through spatial separation of current paths.
Solution Approach 2:
The control system implements periodic pulsed operation of the coil assemblies rather than continuous operation. Coils are activated in sequences and cycles, allowing heat dissipation between pulses and reducing average power consumption while maintaining positioning accuracy through controlled magnetic field generation.
2Manufacturing precision
If multiple groups of coil assemblies are integrated in a single carrier, then high accuracy positioning in multiple degrees of freedom is achieved, but device complexity increases
Solution Approach 1:
The actuator device integrates multiple functional groups into a single carrier structure: the first group of coil assemblies handles positioning in one degree of freedom, the second group handles another degree of freedom, and the third group handles a third degree of freedom. This multi-functional integration achieves high-precision control in multiple dimensions while consolidating what would otherwise require separate actuator devices.
Solution Approach 2:
Multiple coil assembly groups that would traditionally require separate mounting structures and control systems are merged into a single integrated carrier. The carrier provides a unified mechanical platform with recesses for all coil groups, shared control electronics, and coordinated operation, reducing overall system complexity despite the increased functionality.
3Device complexity
If direct motion axis actuators are used for positioning, then simplicity of design is maintained, but acceleration capability and positioning accuracy are limited
Solution Approach 1:
The actuator device implements dynamic control of multiple coil assemblies with independent control signals. The system can rapidly adjust current distribution among different coil groups to achieve high acceleration rates while maintaining positioning accuracy. The dynamic response is enhanced by the magnetic field's inherent responsiveness compared to mechanical actuation systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The actuator device achieves high accuracy and stability in multiple degrees of freedom with reduced vibrations and thermal management, suitable for high-throughput product processing under vacuum conditions.
Implementation Method 1
multiple groups of coil assemblies mounted in the carrier, each group of coil assemblies being structured to orientate the carrier in at least one degree of freedom
Implementation Method 2
thermal management through coolant channels
Implementation Method 3
thermal management through coolant channels
Data Source
AI summary
The invention relates to an actuator device for use in a positioning system, wherein the actuator device is linearly movable within a plane with respect to a supporting structure of the positioning system as well as such a positioning system implementing such an actuator device.In an example of the actuator device according to the invention, it comprises a carrier having a longitudinal and a transversal dimension; and multiple groups of coil assemblies mounted in the carrier, each group of coil assemblies being structured to orientate the carrier in at least one degree of freedom.The single design actuator device according to the invention has limited constructional dimensions and allows high accuracy as to motion and position in multiple degrees of freedom.