Planar Hydrogen Sensor With Slit For Heat Distribution
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Solution Overview
Problem
Current contact combustion type hydrogen sensors are power-intensive, expensive, and have low sensitivity due to their bead-type design and high power consumption, with manufacturing processes being labor-intensive and limiting mass productivity.
Innovation Solution
A contact combustion type hydrogen sensor is developed with a lamination layer, heater, and platinum catalyst stacked on a silicon substrate, featuring a slit extending outside the heating part for improved heat distribution and stress relief, using a MEMS batch process for platinum catalyst deposition and a method involving thin oxide and nitride layers for enhanced performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a bead-type design is used for contact combustion type hydrogen sensor, then the sensor structure is simple, but the power consumption is high and sensitivity is low
Solution Approach 1:
The sensor is segmented into distinct functional layers (silicon substrate, lamination layers, heater, insulating layers, platinum catalyst layer) with each layer performing a specific function. This segmentation allows for optimized heat distribution and catalytic activity, improving sensitivity while maintaining structural simplicity.
Solution Approach 2:
The invention transitions from a traditional bead-type three-dimensional structure to a planar layered structure deposited on a silicon substrate. This dimensional change enables better heat distribution across the catalyst surface and facilitates batch manufacturing processes, thereby improving sensitivity and reducing power consumption.
2Ease of manufacture
If manual manufacturing processes are used for contact combustion type hydrogen sensor, then the manufacturing flexibility is high, but the mass productivity is low
Solution Approach 1:
Multiple manufacturing steps are merged into a single batch process where platinum catalyst is deposited on multiple sensors simultaneously on the silicon substrate. This combining of operations significantly increases mass productivity while the standardized layer structure maintains manufacturing flexibility for process adjustments.
Solution Approach 2:
The same layer structure and manufacturing process are replicated across the entire silicon substrate, creating multiple identical sensor units in parallel. This copying approach enables mass production while maintaining the flexibility to modify the entire process design if needed.
3Extent of automation
If MEMS manufacturing technology with thick or thin film material is used, then the manufacturing automation is high, but the cost is high and sensitivity is low
Solution Approach 1:
The invention changes the material parameter from thick or thin film materials to a specific platinum catalyst layer deposited on insulating layers. This parameter change maintains the benefits of automated MEMS manufacturing while improving sensitivity through the catalytic properties of platinum and the optimized layer structure that enhances heat distribution.
4Use of energy by moving object
If heat is generated from the heater in traditional configuration, then the power consumption is high, but the heat distribution to platinum catalyst is insufficient
Solution Approach 1:
Insulating layers are introduced as intermediary elements between the heater and the platinum catalyst. These insulating layers with specific thermal conductivity properties facilitate more uniform heat distribution to the catalyst while reducing overall power consumption by minimizing heat loss to the substrate.
Solution Approach 2:
The sensor employs a composite layered structure combining silicon substrate, oxide lamination layers, metal heater, insulating layers (oxide and nitride), and platinum catalyst. Each material in the composite structure is selected for its specific thermal and catalytic properties, enabling efficient heat transfer to the catalyst with reduced power consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves higher temperature and more uniform heat distribution, increasing the catalytic activity of the platinum catalyst while reducing residual stress and manufacturing complexity, leading to improved sensitivity and thermal efficiency.
Implementation Method 1
a heater disposed on the lamination layers, and including a connecting part electrically connected to a predetermined part and a heating part operated to be heated when power is applied
Implementation Method 2
a platinum catalyst deposited on the insulating layers and heated by the heater to perform a hydrogen reaction
Implementation Method 3
a slit is formed to extend to an outside of a heating part of the heater, thus providing a higher temperature and more uniform heat distribution when heat generated from the heater is transferred to the platinum catalyst
Data Source
AI summary
An embodiment contact combustion type hydrogen sensor includes a substrate including silicon, lamination layers disposed over a top surface of the substrate and including a first thin oxide layer and a first thin nitride layer, a heater over the lamination layers, the heater including a connecting part electrically connected to a predetermined part and a heating part configured to be heated in response to power being applied, insulating layers covering a top surface of the heater and configured to perform an insulating operation, the insulating layers including a second thin oxide layer and a second thin nitride layer, a platinum catalyst over the insulating layers and configured to be heated by the heater to perform a hydrogen reaction, and a slit outside the heating part and passing through the substrate and the lamination layers.