Planar Magnetic Sensor with Lithographic Polarization Filter
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing Wiegand sensors have a complex manufacturing process and are larger and heavier than semiconductor sensors due to their discrete nature, making them less compatible with semiconductor production and housing, and they require specific material and treatment parameters.
Innovation Solution
A planar integrated circuit is developed with a magnetic component having hard and soft magnetic zones, arranged in a concentric or layered structure, and a sensory component with polarization-sensitive sensors and filters, allowing for automatic mass production and integration with semiconductor processes, using lithographic methods and metal sheets for energy storage and field concentration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If Wiegand wire with hard magnetic sheath and soft magnetic core is used, then magnetic field detection capability is improved, but manufacturing complexity increases and device size increases
Solution Approach 1:
The magnetic component is divided into distinct functional zones: a hard magnetic zone for energy storage and a soft magnetic zone for field concentration. These zones are spatially separated and can be manufactured independently using different processes, then assembled together. This segmentation allows each zone to be optimized for its specific function while simplifying the overall manufacturing process compared to the integrated Wiegand wire structure.
Solution Approach 2:
The patent combines multiple functional elements into a single integrated magnetic component structure. The hard magnetic zone, soft magnetic zone, and sensor are merged into one assembly that works together as a unified system. This merging reduces the number of discrete components needed and simplifies the overall device architecture while maintaining the benefits of both hard and soft magnetic materials.
2Measurement precision
If Wiegand wire with induction coil is used, then magnetic field sensing is improved, but device size and weight increase
Solution Approach 1:
The patent transitions from the three-dimensional Wiegand wire structure to a planar two-dimensional layout. The magnetic component and sensor are arranged in a flat configuration that can be integrated onto a substrate. This dimensional change significantly reduces the volume and weight of the device while maintaining the magnetic sensing functionality through the planar magnetic component structure.
3Reliability
If Wiegand sensor with encapsulation is used, then sensor protection is improved, but integration with semiconductor processes becomes difficult
Solution Approach 1:
The magnetic component structure is designed to be compatible with standard semiconductor manufacturing processes. The planar configuration and use of lithographically definable patterns allow the same fabrication techniques used for semiconductor devices to be applied to the magnetic component. This universality enables co-fabrication or easy integration with semiconductor circuits while maintaining sensor protection through standard encapsulation techniques.
4Force
If field plates with soft magnetic materials are used, then magnetic field influence is improved, but hysteresis effects increase
Solution Approach 1:
Different magnetic zones are assigned different material properties based on their specific functional requirements. The soft magnetic zone uses materials with high permeability for field concentration, while the hard magnetic zone uses materials with high remanence for energy storage. By locally optimizing material properties for each zone's function, the system achieves strong magnetic field influence while the distinct separation of zones prevents unwanted hysteresis interactions between different magnetic materials.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a compact, energy-efficient magnetic field sensor with improved manufacturing compatibility and reduced size, capable of energy harvesting and precise angle or position determination, combining magnetic and optical sensing capabilities for efficient movement detection.
Implementation Method 1
the polarization filter has grating structures produced by lithographic methods in at least one manufacturing level
Implementation Method 2
the at least one magnetic component has a hard magnetic zone with magnetic hysteresis
Implementation Method 3
devices which are configured to make a statement about changes in the magnetic field from the signals of the sensor component
Data Source
Figure 1a)~2b)
Figure 3a)~5)
AI summary
The invention relates to an integrated circuit for measuring magnetic fields and for measuring the polarization of light, comprising at least one sensor component for magnetic fields, with at least one magnetic component arranged to interact with the sensor component as a structural unit, wherein the integrated circuit includes devices configured to derive information about changes in the magnetic field from the signals of the sensor component for magnetic fields, comprising at least two polarization-sensitive sensors with different orientations of the polarization planes, wherein the integrated circuit includes devices configured to derive information about the polarization of the incident light from the signals of the polarization-sensitive sensors, and comprising at least one sensor element.which is arranged together with a polarization filter to form one of the polarization-sensitive sensors as a structural unit, wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a targeted extent and orientation, wherein the polarization filter has grid structures produced by lithographic methods in at least one manufacturing plane.