Planar Magnetic Sensor With Segmented Hard Soft Zones
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Solution Overview
Problem
Existing magnetic field measurement devices, such as Wiegand sensors, have complex manufacturing processes and are bulky due to their discrete and wired nature, making them incompatible with semiconductor production and integration.
Innovation Solution
A planar magnetic sensor device is developed, comprising a magnetic component with hard and soft magnetic zones and a sensory component, arranged in a planar configuration, allowing for automatic mass production and integration with semiconductor processes, using layered sheets or sheet metal pieces with varying magnetic hardness, and an integrated coil for energy harvesting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a Wiegand wire with hard magnetic sheath and soft magnetic core is used, then discrete event detection capability is improved, but device complexity and manufacturing complexity increase
Solution Approach 1:
The magnetic component is segmented into distinct soft magnetic and hard magnetic zones arranged in a specific pattern. This segmentation allows the sensor to detect discrete events through magnetic field changes while maintaining a simpler overall structure compared to traditional Wiegand wires, resolving the contradiction between detection capability and structural complexity.
Solution Approach 2:
Different zones of the magnetic component have different magnetic properties (soft vs. hard magnetic characteristics). This local differentiation of magnetic quality enables discrete event detection while allowing the use of standard semiconductor manufacturing processes for the overall device, reducing manufacturing complexity.
2Use of energy by moving object
If a slim induction coil encircling the Wiegand wire is used, then energy harvesting capability is improved, but device dimensions and weight increase
Solution Approach 1:
The induction coil is extracted from the traditional encircling configuration and integrated directly into the semiconductor substrate beneath the magnetic component. This extraction eliminates the need for a separate bulky coil structure, enabling energy harvesting while maintaining a lightweight, compact sensor design.
Solution Approach 2:
The induction coil and semiconductor substrate are merged into a single integrated structure. The coil traces are formed as part of the semiconductor manufacturing process, combining the energy harvesting function with the sensor substrate to reduce overall device weight and complexity.
3Measurement precision
If traditional Wiegand sensor manufacturing processes are used, then discrete event detection accuracy is improved, but productivity and mass manufacturability worsen
Solution Approach 1:
The mechanical Wiegand wire manufacturing process (tempering, repeated torsion) is replaced with semiconductor manufacturing techniques. The magnetic component is created using sputtering or evaporation to deposit magnetic material layers, followed by photolithography and etching to form the desired pattern, enabling high-volume production while maintaining detection accuracy.
Solution Approach 2:
The manufacturing parameters are changed from mechanical processing (temperature, torsion cycles) to semiconductor process parameters (deposition thickness, photolithography patterns, etch conditions). This parameter transformation enables the production of magnetic components with precise geometric control suitable for mass manufacturing while preserving the magnetic properties needed for accurate discrete event detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The planar sensor is compact, energy-efficient, and capable of detecting discrete events and counting magnetic pulses with high accuracy, enabling precise angle or position determination, and can be manufactured in large quantities using existing semiconductor production steps.
Implementation Method 1
at least one magnetic component has a hard magnetic zone with magnetic hysteresis
Implementation Method 2
at least one sensory component has a sensor for magnetic fields, the field lines of at least one magnetic component at least partially penetrate a sensory component for magnetic fields
Implementation Method 3
an integrated coil for energy harvesting
Data Source
Figure 1a~2b
Figure 3a~5
AI summary
The invention relates to a device for measuring magnetic fields, comprising, in particular, at least one sensor component and at least one magnetic component. It is proposed that at least one magnetic component has a hard magnetic zone with magnetic hysteresis, that at least one sensor component has a sensor for magnetic fields, that the field lines of at least one magnetic component at least partially penetrate a sensor component for magnetic fields, and that the device is suitable for detecting discrete events, in particular for counting.