Planar MEMS Pump Layout for Low-Resistance Gas Sampling
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Solution Overview
Problem
Existing micro pumps are inefficient for enhancing the transport of ambient fluid or air to gas sensors, particularly in pollution detection systems, where low concentrations of harmful gases and particles require precise and rapid measurement, and they often suffer from high fluidic resistance and complexity.
Innovation Solution
A MEMS pump design featuring a basis structure, a deflectable membrane structure, and an in-plane passage with a valve structure that connects to different outer volumes, allowing for efficient fluid transport by controlling the valve and membrane to change the pump chamber volume, thereby optimizing fluid flow and reducing thickness and fluidic resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional micro pumps are used to enhance fluid transport to gas sensors, then sampling rate and measurement precision can be improved, but device complexity and fluidic resistance increase
Solution Approach 1:
The pump chamber is divided into distinct regions with separate inlet and outlet passages, allowing independent control of fluid intake and discharge. The valve structure is segmented into movable and stationary parts that work together to control flow directions, enabling precise fluid management while maintaining a compact overall structure
Solution Approach 2:
The passage is arranged in-plane with the pump chamber rather than vertically, transitioning from a three-dimensional stacked configuration to a two-dimensional planar layout. This reduces the vertical thickness of the pump while maintaining effective fluid transport pathways, and allows better integration with planar sensor systems
2Measurement precision
If conventional micro pumps are used to enhance fluid transport to gas sensors, then measurement precision can be improved, but fluidic resistance increases
Solution Approach 1:
The valve structure incorporates movable components that dynamically open and close passages based on pump chamber pressure changes. This dynamic control optimizes fluid flow paths, reducing resistance during both intake and discharge phases while maintaining precise control over fluid transport to the sensor
Solution Approach 2:
The pump chamber volume is dynamically changed by deflecting the membrane structure, creating pressure differentials that drive fluid flow. By controlling the magnitude and timing of volume changes, the system optimizes flow rates and minimizes fluidic resistance while maintaining precise pollution detection capabilities
3Adaptability or versatility
If a traditional pump design is used, then fluid transport function is achieved, but thickness and integration capability are reduced
Solution Approach 1:
The inlet and outlet passages are merged into a single plane within the pump chamber structure, eliminating the need for separate vertical layers. The valve structure is integrated directly into the pump chamber walls, and the membrane structure serves dual functions as both the pumping element and the sealing element, reducing overall thickness while maintaining full pump functionality
Solution Approach 2:
The pump utilizes a flexible membrane structure that deflects to change pump chamber volume, replacing rigid moving parts with thin flexible films. This membrane serves as both the actuating element and the sealing element, enabling the pump to achieve full functionality with minimal thickness for seamless integration into compact sensor systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The MEMS pump enhances sampling rate and precision in pollution detection by efficiently transporting fluids, reducing measurement time, and integrating seamlessly into sensor systems while maintaining a compact and cost-effective design.
Implementation Method 1
a membrane structure opposing the basis structure and being deflectable parallel to a surface normal of the basis structure
Data Source
Figure 1
Figure 2
Figure 3a
AI summary
A MEMS pump comprises a basis structure, a membrane structure opposing the basis structure and being deflectable parallel to a surface normal of the basis structure and comprises a pump chamber between the basis structure and the membrane structure wherein a volume of the pump chamber is based on a position of the membrane structure with respect to the basis structure. The MEMS pump comprises a passage configured for letting a fluid pass into the pump chamber or exit the pump chamber, wherein the passage is arranged in-plane with respect to the pump chamber. The MEMS pump comprises a valve structure fluidically coupled to the passage and configured for connecting, in a first state, the passage to a first outer volume so as to provide the fluid to the pump chamber and for connecting, in a second state, the passage to a second outer volume so as to provide the fluid to the second outer volume.