Moving Magnet Planar Motor Quadrant Segmentation for Lithography Stage Proximity
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Solution Overview
Problem
In lithography systems, moving magnet planar motors face challenges in allowing two stages to operate close together due to unwanted disturbance forces generated when stages are in close proximity, which necessitates increased spacing and compromises system performance.
Innovation Solution
A moving magnet planar motor arrangement with stacked coils and magnet arrays featuring quadrants of magnets spaced apart, allowing for precise control and minimizing interaction between stages by ensuring that coils interact with only one quadrant at a time, thereby reducing unwanted forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If two stages are spaced further apart to avoid disturbance forces, then disturbance forces on the other stage are reduced, but the ability for two stages to operate close together is compromised
Solution Approach 1:
The magnet array is divided into multiple quadrants with spacing between them. Each quadrant can be independently controlled to generate forces in specific directions. This segmentation allows selective activation of quadrants to minimize disturbance forces on adjacent stages while maintaining driving capability.
Solution Approach 2:
Different quadrants of the magnet array have different orientations and functions. By locally optimizing the orientation of magnets in each quadrant (e.g., X magnets for X-direction force, Y magnets for Y-direction force), the system can generate desired forces while minimizing unwanted cross-coupling and disturbance forces on nearby stages.
2Measurement precision
If quadrants of magnets are spaced apart to facilitate accurate control of a single stage, then control accuracy is improved, but the compactness of the motor arrangement is reduced
Solution Approach 1:
The magnet array is arranged in a two-dimensional planar configuration with quadrants spaced in both X and Y directions. This 2D arrangement allows independent control of forces in multiple directions while maintaining a compact overall footprint, resolving the conflict between control accuracy and compactness.
Solution Approach 2:
Multiple quadrants are arranged in a nested or adjacent configuration within a compact planar motor structure. The spaced quadrants are integrated into a unified motor assembly that maintains compactness while allowing independent control of each quadrant for accurate stage positioning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables two stages to operate in close proximity without significant adverse effects, enhancing the performance of lithography systems by maintaining accurate control and minimizing disturbance forces.
Implementation Method 1
A stator may include some coils oriented to produce force in at least an X direction, e.g., X coils, and other coils oriented to produce force in at least a Y direction, e.g., Y coils. The magnets and the stator are generally effective in generating desired forces
Implementation Method 2
one of which contains an array of coils and the other of which contains an array of permanent magnets
Data Source
AI summary
According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage.