Planar Motor Substrate Transfer for Vacuum-Clean Handling
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Solution Overview
Problem
Existing substrate processing systems face challenges in maintaining a high vacuum within transfer modules due to external motor sources of dust and require wider chamber openings for handling, which complicates the transfer process.
Innovation Solution
A substrate transfer device is designed with first and second planar motors installed in separate chambers, each with an array of coils, and a pair of transfer units that move on these motors to transfer substrates, controlled by a system that manages electric current supply to the coils.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If motors are arranged outside the transfer module, then the transfer module can be sealed, but it becomes difficult to maintain high vacuum inside the transfer module
Solution Approach 1:
The motor is extracted from the vacuum environment and placed in a separate motor chamber, eliminating the source of dust contamination while maintaining vacuum integrity in the transfer module. The magnetic drive mechanism allows power transmission across the vacuum boundary without physical penetration.
Solution Approach 2:
A magnetic field acts as an intermediary to transmit rotational force from the motor in the motor chamber to the articulated arm in the vacuum chamber without physical connection. This magnetic coupling enables vacuum isolation while maintaining mechanical actuation capability.
2Ease of operation
If the opening of the chamber is widened for substrate handling, then substrate transfer is easier, but the vacuum seal becomes more difficult to maintain
Solution Approach 1:
The chamber is segmented into separate functional zones (motor chamber, transfer module, processing chambers) with controlled interfaces. This segmentation allows optimized opening sizes for each zone - the motor chamber can have larger openings for motor access while the transfer module maintains tight sealing for vacuum integrity.
Solution Approach 2:
The motor shaft passes through the bottom surface of the transfer module in a vertical dimension, allowing the horizontal opening of the transfer module to remain small for vacuum sealing while still accommodating motor actuation through the bottom access point.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for improved vacuum maintenance within the transfer module, reduces dust generation, and enhances the flexibility of substrate handling, enabling more efficient and precise transfer operations.
Implementation Method 1
a first planar motor installed in a first chamber and having an array of coils; a second planar motor installed in a second chamber connected to the first chamber and having an array of coils
Data Source
AI summary
A substrate transfer device, includes: a first planar motor installed in a first chamber and having an array of coils; a second planar motor installed in a second chamber connected to the first chamber and having an array of coils; a pair of transfer units configured to move on at least one of the first planar motor and the second planar motor and configured to transfer a substrate; and a controller configured to control supply of electric current to the coils of the first planar motor and the second planar motor.