Planar Motor Substrate Transport With Rotating Expandable Holder
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Solution Overview
Problem
Existing substrate transport systems in semiconductor manufacturing face challenges with gas intrusion and limited rotation and expansion movements, leading to increased installation area requirements and higher clean room costs due to the need for larger vacuum transport chambers.
Innovation Solution
A substrate transport apparatus utilizing a planar motor with magnetic levitation and a link mechanism that allows for the rotation and expansion of a substrate holder, reducing the occupied area by minimizing the transport unit's footprint through controlled magnetic levitation and linear movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a transport robot with articulated arm structure is used, then substrate transport is achieved, but the area occupied by the transport unit increases and rotation/expansion movements are limited
Solution Approach 1:
The patent replaces the traditional articulated arm mechanical structure with a planar motor system using magnetic levitation. The planar motor includes a stator with coil units and a rotor with magnets, eliminating mechanical contact and enabling larger movement ranges without increasing the occupied area. This substitution resolves the contradiction by providing transport capability through electromagnetic fields rather than mechanical arms.
Solution Approach 2:
The patent implements a dynamic base structure that can rotate and expand/contract. The base includes a first base and second base connected by a link mechanism, allowing the substrate holder to dynamically adjust its position and orientation. This dynamic configuration enables the transport unit to perform substrate transport while maintaining a compact footprint, resolving the area occupation issue.
2Reliability
If a planar motor with magnetic levitation is used, then gas intrusion and rotation/expansion limitations are solved, but the area occupied by the transport unit increases
Solution Approach 1:
The patent utilizes vertical magnetic levitation to elevate the substrate holder above the base plane, creating three-dimensional movement capability. The planar motor generates magnetic fields that levitate the rotor vertically, allowing the substrate holder to move in multiple dimensions without requiring a larger horizontal footprint. This dimensional approach resolves the area occupation contradiction while maintaining vacuum integrity.
Solution Approach 2:
The patent employs a nested configuration where the link mechanism connects the first base and second base in a compact arrangement. The substrate holder is nested within the base structure when not in use, and the link mechanism folds or retracts to minimize the occupied area. This nesting strategy allows the transport unit to maintain compact dimensions while providing full rotation and expansion capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the area occupied by the transport unit, allowing for more compact substrate processing systems with enhanced movement capabilities, thereby reducing clean room costs and increasing the flexibility of processing chamber placement.
Implementation Method 1
a linear driver configured to supply power to the electromagnetic coils to magnetically levitate and also linearly drive the base
Implementation Method 2
a planar motor having a main body, a plurality of electromagnetic coils arranged in the main body
Implementation Method 3
the link member is rotatably connected to the second member, and the linear driver rotates the second member with respect to the first member and expands and contracts the substrate holder via the link member
Data Source
AI summary
A substrate transport apparatus which transports a substrate to a substrate transport position. The apparatus comprises: a transport unit including a substrate holder that holds the substrate, a base having magnets and configured to move the substrate holder, and a link member connecting the substrate holder to the base; and a planar motor having a main body, electromagnetic coils arranged in the main body, and a linear driver supplying power to the electromagnetic coils to magnetically levitate and linearly drive the base. The base includes a first member and a second member rotatably provided in the first member, and the magnets are provided inside the first member and the second member, the link member is rotatably connected to the second member, and the linear driver rotates the second member with respect to the first member and expands and contracts the substrate holder via the link member.