Planar Motor Substrate Transfer for Thermal Drift Compensation
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Solution Overview
Problem
Existing substrate processing systems fail to achieve precise substrate transfer due to thermal expansion and deformation of the vacuum transfer chamber, leading to positional misalignment and reduced transfer accuracy in substrate processing systems.
Innovation Solution
A substrate processing system using a planar motor with magnetically levitated tiles connected directly to processing chambers, allowing for high positional accuracy by controlling the magnetic levitation and linear movement of the substrate holder, and incorporating gaps to absorb thermal expansion differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a substrate transfer device uses a planar motor with magnetic levitation to transfer substrates, then transfer speed and automation are improved, but thermal expansion and deformation of the vacuum transfer chamber cause positional misalignment and reduce transfer accuracy
Solution Approach 1:
The planar motor is divided into multiple independent coil units arranged in a matrix pattern across the transfer chamber bottom. Each coil unit can be independently controlled to generate magnetic fields, allowing segmented compensation for thermal deformation by adjusting individual coil activations based on real-time positional feedback.
Solution Approach 2:
Position detection means are provided to detect the actual position of the substrate during transfer. This feedback information is used to correct positional deviations caused by thermal expansion, enabling closed-loop control that maintains high positioning accuracy despite thermal effects on the chamber structure.
2Adaptability or versatility
If the vacuum transfer chamber is made larger to accommodate multiple processing chambers, then system versatility is improved, but thermal expansion and deformation increase, reducing transfer accuracy
Solution Approach 1:
The large transfer chamber is equipped with a segmented planar motor system where multiple coil units are distributed across the chamber bottom. This segmentation allows localized magnetic field generation and independent control of different motor zones, enabling accurate substrate positioning even in a large chamber that must accommodate multiple processing chambers.
Solution Approach 2:
The system dynamically adjusts magnetic field parameters (coil current, activation pattern, field strength) based on the substrate's position and the chamber's thermal state. This parameter control allows the planar motor to compensate for thermal deformation and maintain positioning accuracy regardless of chamber size or number of processing chambers.
3Ease of operation
If magnetic levitation is used to reduce friction and improve transfer smoothness, then ease of operation is improved, but control precision for high-accuracy positioning becomes more difficult
Solution Approach 1:
Position detection means continuously monitor the substrate's position during magnetic levitation transfer. This feedback enables real-time adjustment of magnetic field strength and distribution, allowing precise control of the levitated substrate's position and velocity, thereby resolving the difficulty of controlling magnetic levitation for high-precision positioning.
Solution Approach 2:
The planar motor system dynamically adjusts magnetic field parameters during substrate transfer, transitioning between different operational states (levitation, positioning, deceleration). This dynamic control allows the system to maintain ease of operation through magnetic levitation while achieving high positioning precision through real-time parameter adjustment based on feedback.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances substrate transfer accuracy by compensating for thermal expansion and deformation, ensuring precise positioning of substrates onto mounting units despite chamber changes, thereby improving processing efficiency.
Implementation Method 1
a linear driving device configured to supply power to the electromagnetic coils and magnetically levitate and linearly drive the base
Implementation Method 2
a planar motor having a plurality of tiles arranged along the bottom portion of the transfer chamber, a plurality of electromagnetic coils disposed in each of the plurality of tiles
Implementation Method 3
a planar motor having a plurality of tiles arranged along the bottom portion of the transfer chamber, a plurality of electromagnetic coils disposed in each of the plurality of tiles
Data Source
AI summary
A substrate processing system comprises a module having a mounting unit on which a substrate is mounted, a transfer chamber connected to the module, and a substrate transfer device disposed in the transfer chamber and configured to transfer the substrate to the module. The substrate transfer device includes a transfer unit having a substrate holder and a base that has therein a magnet and moves the substrate holder along a bottom portion of the transfer chamber, and a planar motor having a plurality of tiles arranged along the bottom portion of the transfer chamber, a plurality of electromagnetic coils disposed in the plurality of tiles, and a linear driving device configured to supply power to the electromagnetic coils and magnetically levitate and linearly drive the base. A tile corresponding to the module among the plurality of tiles is connected to the module without being connected to the transfer chamber.