Planar Motor Tile Layout for Accurate Substrate Transfer
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Solution Overview
Problem
Existing substrate processing systems face challenges in maintaining high positional accuracy during substrate transfer due to thermal expansion and deformation of the vacuum transfer chamber, which affects the alignment of tiles and subsequent substrate handling precision.
Innovation Solution
A substrate processing system utilizing a planar motor with tiles connected directly to processing chambers, allowing for magnetic levitation and precise linear movement of a substrate holder, while incorporating tiles that follow thermal expansion independently of the vacuum transfer chamber, and employing a control mechanism to adjust current distribution for positional correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If tiles are connected to the vacuum transfer chamber, then the planar motor structure is complete and functional, but thermal expansion and deformation of the vacuum transfer chamber cause positional misalignment of the tiles
Solution Approach 1:
The tile connection structure is segmented into two types: tiles connected to the vacuum transfer chamber (for structural support) and tiles connected directly to processing chambers (for positional accuracy). This segmentation allows different parts of the system to serve different functions - structural integrity versus precision positioning - resolving the contradiction between completeness and accuracy.
Solution Approach 2:
Different connection methods are applied to different tiles based on their functional requirements. Tiles at processing chamber interfaces use direct connections for high precision, while other tiles use vacuum chamber connections for structural support. This local differentiation resolves the contradiction by optimizing each tile's connection method for its specific role.
2Stability of the object's composition
If the vacuum transfer chamber is used as a structural support, then the overall system is stable, but thermal expansion causes deformation and affects substrate transfer precision
Solution Approach 1:
The processing chamber acts as an intermediary between the vacuum transfer chamber and the tiles. Instead of tiles being directly supported by the thermally expanding vacuum transfer chamber, they are supported through the processing chamber interface, which provides a stable reference point. This intermediary structure isolates the precision-critical tiles from thermal deformation.
Solution Approach 2:
The support structure is segmented into thermal support (vacuum transfer chamber providing overall structural stability) and precision support (processing chamber providing stable reference for tiles). This segmentation allows the system to benefit from both thermal expansion of the main chamber while maintaining precision at the substrate interface.
3Device complexity
If all tiles are connected to the vacuum transfer chamber, then the planar motor structure is simplified, but positional misalignment occurs due to thermal expansion
Solution Approach 1:
Different connection strategies are applied locally to different tiles: tiles at processing chamber interfaces connect directly to chambers for precision, while other tiles connect to the vacuum chamber for structural support. This local quality differentiation resolves the contradiction by optimizing connection methods for specific functional requirements rather than using a uniform approach.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances substrate transfer accuracy by minimizing positional misalignment, ensuring high-precision processing even with thermal expansion, and enabling efficient parallel or serial transfer of substrates across multiple chambers.
Implementation Method 1
a linear driving device configured to supply power to the electromagnetic coils and magnetically levitate and linearly drive the base
Implementation Method 2
a linear driving device configured to supply power to the electromagnetic coils and magnetically levitate and linearly drive the base
Implementation Method 3
a base that has therein a magnet and moves the substrate holder along a bottom portion of the transfer chamber
Data Source
AI summary
A substrate processing system comprises a module having a mounting unit on which a substrate is mounted, a transfer chamber connected to the module, and a substrate transfer device disposed in the transfer chamber and configured to transfer the substrate to the module. The substrate transfer device includes a transfer unit having a substrate holder and a base that has therein a magnet and moves the substrate holder along a bottom portion of the transfer chamber, and a planar motor having a plurality of tiles arranged along the bottom portion of the transfer chamber, a plurality of electromagnetic coils disposed in the plurality of tiles, and a linear driving device configured to supply power to the electromagnetic coils and magnetically levitate and linearly drive the base. A tile corresponding to the module among the plurality of tiles is connected to the module without being connected to the transfer chamber.