Planar Substrate Transfer Linkage for High-Vacuum Handling
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Solution Overview
Problem
Existing substrate processing systems face challenges in maintaining a high vacuum environment due to motor-induced dust generation and poor handling mechanisms, particularly with multi-joint arms that require sealing and wider chamber openings.
Innovation Solution
A substrate transfer apparatus utilizing a planar motor with coils and a link mechanism, where two bases with magnets are movable on the motor, connected via a link mechanism to a substrate support, allowing for precise control of the transfer unit's position and orientation within a vacuum chamber, eliminating the need for penetration seals and enhancing vacuum integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If multi-joint arms with rotary shafts penetrating the transfer module bottom are used, then substrate transfer capability is improved, but vacuum integrity deteriorates due to magnetic seal requirements
Solution Approach 1:
The motor is extracted from the vacuum chamber environment and placed in the external drive unit, eliminating the need for rotary shafts penetrating the transfer module bottom. This removes the magnetic seal requirement and preserves vacuum integrity while maintaining substrate transfer capability through magnetic coupling transmission.
Solution Approach 2:
The system is segmented into a vacuum-side transfer module and an external drive unit separated by a vacuum barrier. The planar motor is located in the external drive unit, while only the magnetic coupling interface penetrates the vacuum barrier, minimizing seal requirements and maintaining vacuum integrity.
2Object-generated harmful factors
If motors are disposed outside the transfer module, then dust generation is reduced, but vacuum maintenance becomes difficult due to seal requirements
Solution Approach 1:
The motor is extracted from the vacuum chamber and placed in the external drive unit, eliminating dust generation within the vacuum environment. The magnetic coupling transmission interface minimizes seal requirements, allowing vacuum maintenance while enabling motor-driven substrate transfer.
3Reliability
If planar motor with external drive unit is used, then vacuum integrity is improved by eliminating penetration seals, but device complexity increases
Solution Approach 1:
The planar motor and transfer module are merged into an integrated system where the magnetic coupling interface serves dual purposes: transmitting mechanical motion while maintaining vacuum barrier. This reduces the number of separate components and simplifies the overall structure despite the external drive configuration.
4Ease of operation
If multi-joint arms with sealed rotary shafts are used, then substrate transfer is enabled, but manufacturing complexity increases due to seal requirements
Solution Approach 1:
The motor is extracted from the vacuum chamber, eliminating the need for sealed rotary shafts and magnetic seals. This simplifies manufacturing by removing complex sealing components while maintaining substrate transfer capability through the external drive unit with magnetic coupling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution maintains a high vacuum environment by eliminating the need for penetration seals and reduces dust generation, while improving handling and design flexibility by allowing for more compact chamber configurations.
Implementation Method 1
a planar motor provided in a transfer chamber and having coils arranged therein; a transfer unit movable on the planar motor
Implementation Method 2
the gap between the bottom and the rotary shaft is sealed by a magnetic seal
Data Source
AI summary
A substrate transfer apparatus includes a planar motor provided in a transfer chamber and having coils arranged therein, a transfer unit movable on the planar motor, and a control unit configured to control an energization of the coils. The transfer unit includes two bases having magnets arranged thereon and configured to be movable on the planar motor, a substrate support member configured to support a substrate, and a link mechanism configured to connect the two bases and the substrate support member to each other.