Atomic Object Confinement with Planarized Electrodes and Metasurfaces

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Solution Overview

Problem

Conventional methods for forming surface electrodes of atomic object confinement apparatuses result in significant surface topology, making it difficult to integrate metasurfaces with predictable optical properties, and trapped electrical charges can negatively affect operation.

Innovation Solution

The use of a damascene process to form planarized segmented electrodes with smooth surfaces, followed by deposition of a template layer and patterning to create metasurfaces, ensuring electrodes have an RMS roughness of 5 nm or less and enabling flexible placement of metasurfaces for out-of-plane signal manipulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional methods are used to form surface electrodes, then electrode functionality is achieved, but significant surface topology is created making it difficult to integrate metasurfaces with predictable optical properties

Engineering Contradiction:

Improvesurface flatnessVSAvoidelectrode fabrication complexity

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The electrode fabrication process is segmented into distinct stages: forming electrode openings in the substrate, depositing electrode material, and planarizing the surface. This segmentation allows each stage to be optimized independently, achieving both functional electrodes and flat surfaces suitable for metasurface integration.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The substrate is prepared with pre-formed openings or recesses at the electrode locations before electrode material deposition. This preliminary action creates a foundation that enables subsequent planarization to achieve flat surfaces while maintaining electrode functionality, resolving the contradiction between electrode formation and surface flatness.

Inventive Principle:

Principle #10Preliminary action

2Reliability

If segmented electrodes are used to generate trapping potential, then atomic object confinement is achieved, but a significant amount of surface area is filled making optical component positioning difficult

Engineering Contradiction:

Improveconfinement stabilityVSAvoidoptical component positioning

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent transitions from planar electrode segmentation to three-dimensional surface relief structures. By forming electrodes with controlled depth and profile in the substrate, the system maintains electrical functionality for confinement while creating vertical separation between electrode surfaces and optical component locations, enabling independent positioning in the vertical dimension.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The electrode array is segmented into discrete elements with controlled spacing and depth. This segmentation allows optical components to be positioned in the gaps or at different vertical levels between electrode elements, resolving the conflict between needing sufficient electrode surface area for confinement and requiring open space for optical component placement.

Inventive Principle:

Principle #1Segmentation

3Adaptability or versatility

If metasurfaces are formed on non-planar electrode surfaces, then integration is achieved, but optical properties become unpredictable

Engineering Contradiction:

Improvemetasurface integrationVSAvoidoptical property predictability

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent applies different surface treatments to different regions: electrode areas are planarized to achieve flat surfaces for predictable metasurface optical properties, while non-electrode areas maintain their original topology for optical component placement. This local differentiation allows simultaneous achievement of both requirements.

Inventive Principle:

Principle #3Local quality

4Duration of action of stationary object

If electrical charge becomes trapped on optical components, then operation continues, but apparatus performance is negatively affected

Engineering Contradiction:

Improveoperation continuityVSAvoidapparatus performance

Core Design Contradiction:

Duration of action of stationary objectVSReliability

Solution Approach 1:

The patent physically separates optical components from electrode surfaces by positioning them in gaps between segmented electrodes or at different vertical levels. This extraction removes the source of charge trapping problems while maintaining operational continuity, as optical components no longer contact charged electrode surfaces.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

Dielectric layers or gaps serve as intermediary barriers between optical components and electrode surfaces. These intermediaries prevent direct contact and charge transfer, eliminating the harmful effect of trapped charges while allowing the system to operate continuously without performance degradation.

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS20250285780A1Atomic object confinement apparatus having patterned components formed on surface electrodes

Publication Date: 2025.09.11 QUANTINUUM LLC

AI summary

An atomic object confinement apparatus includes a substrate comprising a plurality of vias; a plurality of segmented electrodes disposed on a surface of the substrate and in electric communication with respective vias of the plurality of vias; and a patterned component (e.g., metasurface, diffractive optical element, alignment marks) formed on an electrode surface of a segmented electrode of the plurality of segmented electrodes.