Plane Mirror Interferometer Spatial Beam Separation

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Solution Overview

Problem

Displacement measuring interferometers (DMIs) face measurement errors and inaccuracies due to alignment errors, thermal effects, optical mixing, polarization leakage, and diffraction-induced fringing, which are not adequately addressed in existing technologies, particularly in scaling up or down over multiple optical axes.

Innovation Solution

A plane mirror interferometer design that keeps separate input light beams distinct until combined in a polarizing or non-polarizing rhomb sub-assembly, with balanced path lengths and strategically positioned beam blockers to reduce errors, allowing for scalability across multiple optical axes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If reference and measurement beams are combined early in the optical path, then the interferometer can be compact, but non-linear errors and optical mixing increase

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidoptical path separation
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The optical path is segmented into separate reference and measurement beam paths that remain spatially separated for most of their length. The beams are divided and traveled through different optical paths before being recombined at the detector, preventing premature mixing and reducing non-linear errors.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses spatial separation in multiple dimensions to keep beams distinct. By separating beams in space rather than just time or frequency, the design maintains compactness while avoiding optical mixing that would occur in a single-dimensional arrangement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of operation

If mirror alignment is simplified, then ease of operation improves, but measurement precision deteriorates due to alignment errors

Engineering Contradiction:
Improvemirror alignmentVSAvoiddisplacement measurement accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent extracts the alignment sensitivity from the system by using a common optical path architecture where both beams share the same optical components. This removes the need for precise mirror alignment while maintaining measurement precision, as any alignment errors affect both beams equally and cancel out.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The design changes the operational parameters by using frequency modulation (heterodyne interferometry) rather than relying on spatial alignment. The measurement is based on frequency difference detection rather than beam overlap precision, fundamentally changing how the system achieves accuracy without stringent alignment requirements.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If separate fiber optic channels are used for reference and measurement beams, then non-linear errors are minimized, but device complexity increases

Engineering Contradiction:
Improvenon-linear error reductionVSAvoidfiber optic channel separation
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent merges the reference and measurement beams into a single optical path at the detector while maintaining their frequency separation. This combination approach achieves non-linear error reduction without requiring separate fiber optic channels throughout the entire system, reducing complexity while maintaining precision.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent uses frequency modulation as an intermediary to distinguish between reference and measurement beams. Rather than relying on physical separation through fiber optic channels, the frequency difference serves as the distinguishing characteristic, allowing beams to share the same path while remaining distinguishable and error-free.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design significantly minimizes non-linear and thermal measurement errors, enhancing accuracy and stability while enabling straightforward scaling of DMIs across multiple optical axes.

Implementation Method 1

a polarizing or non-polarizing beam splitter sub-assembly

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 2

first and second quarter-wave plates

Methodology Applied
Scientific EffectQuarter-wave plate effect:

Implementation Method 3

first and second cube corner reflectors

Methodology Applied
Scientific EffectRetroreflection: Retroreflector

Implementation Method 4

Displacement measuring interferometers (DMIs) are well known in the art, and have been used to measure small displacements and lengths to high levels of accuracy and resolution

Methodology Applied
Scientific EffectOptical interference: Interference

Data Source

PatentUS7705994B2Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs
Publication Date: 2010.04.27 KEYSIGHT TECHNOLOGIES INC
  • US7705994B2 patent drawing
  • US7705994B2 patent drawing
  • US7705994B2 patent drawing

AI summary

An interferometer and corresponding system are provided having several aspects. In a first aspect, there is provided an interferometer adapted to receive separate first and second beams f1 and f2 therein, the interferometer comprising substantially equivalent and separate first and second optical pathways for the first and second beams f1 and f2. In a second aspect, there is provided an interferometer adapted to receive as separate inputs therein first and second beams f1 and f2, where such beams are not mixed or combined until just prior to being output by the interferometer. In a third aspect, an interferometer is provided having one or more beam blockers for intercepting extraneous or undesired light, and keeping such light from contaminating or interfering with separate beams f1 and f2.