Planetary Rotary Rack for Uniform Nano-Coating Thickness
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Solution Overview
Problem
Inconsistent polymer coating quality in batch production due to uneven gas distribution during plasma coating, where chemical monomer gas diffuses towards air exhausting ports, resulting in thicker coatings in some areas and thinner coatings in others.
Innovation Solution
A planetary rotary rack device for nano coating equipment featuring a chamber with a rotary motor and planetary rotary shafts, allowing dual rotation of work pieces and even gas mixing, with a hollow tube at the central axis to facilitate radial diffusion of monomer gases, ensuring consistent coating thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If continuous air exhausting is performed through a fixed air exhausting port during plasma coating, then the low pressure state is maintained, but the chemical monomer gas diffuses towards the air exhausting port causing uneven gas distribution and inconsistent coating quality
Solution Approach 1:
The patent introduces a planetary rotary rack that rotates workpieces during plasma coating, transforming the static coating process into a dynamic one. This rotation ensures that all surfaces of the workpiece are evenly exposed to the chemical monomer gas distribution, eliminating the uneven coating caused by fixed port positions and maintaining consistent coating quality throughout.
Solution Approach 2:
The planetary rotary rack adds rotational movement in multiple dimensions, allowing workpieces to rotate around their own axes while also orbiting around the chamber center. This multi-dimensional movement distributes the workpiece surfaces uniformly across the gas flow field, preventing localized concentration effects near the air exhausting port.
2Device complexity
If fixed feeding and exhausting ports are used in plasma coating equipment, then the equipment structure is simple, but the chemical monomer gas distributes unevenly resulting in thicker coating near feeding port and thinner coating elsewhere
Solution Approach 1:
Instead of modifying the fixed port structure, the patent introduces dynamic rotation of the workpiece holder. This allows the workpiece to move through different positions relative to the fixed feeding and exhausting ports during the coating process, ensuring uniform exposure to the gas flow and eliminating position-dependent coating variations.
Solution Approach 2:
The planetary rotary rack automatically positions different surfaces of the workpiece toward the feeding and exhausting ports during rotation, eliminating the need for multiple fixed ports or complex port positioning mechanisms. The system uses the rotation itself to achieve uniform gas distribution across all workpiece surfaces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The dual rotation mechanism and radial gas diffusion ensure uniform chemical monomer gas distribution, preventing uneven coating thickness and achieving consistent polymer coating quality across all surfaces.
Implementation Method 1
The through hole on the hollow tube at the location of the central shaft can make the chemical monomer gas in the chamber develop a trend to diffuse towards the location of the through hole in the radial direction of each rack layer
Implementation Method 2
the air in a chamber of the coating equipment needs to be exhausted in order to maintain a low pressure state
Implementation Method 3
process and chemical monomer gases need to be supplied for reacting to generate a polymer coating
Data Source
Figure 1
AI summary
A planetary rotary rack device for nano coating equipment, and belongs to the field of vacuum coating technologies. In the device, an air exhausting port (2) is connected to the top of a chamber (3), a hollow tube (10) is installed at a central axis location of the chamber (3), and the air exhausting port (2) is connected to the upper end of the hollow tube (10); a rotary motor (9) is installed at the bottom of the chamber (3), and a planetary rotary rack is installed on the rotary motor (9); in the planetary rotary rack, a rotary shaft is connected to the rotary motor (9); the rotary shaft and the hollow tube (10) are coaxial; a rotary rack (11) is fixed to the rotary shaft; at least two planetary rotary shafts (6) are disposed on the rotary rack (11), symmetrically; at least one rack layer (8)is disposed on the planetary rotary shaft (6); and a work piece (7) to be processed is placed on the rack layer (8). During coating, a work piece not only revolves around the central rotary shaft, but also rotates around the planetary rotary shaft. The continuous dual rotation prevents uneven densities of the chemical monomer gas in different areas from causing the phenomenon of uneven coating thickness of work pieces (7) in fixed areas. At the same time, the rotation of the planetary rotary rack is beneficial for full and even mixing of the chemical monomer gas in the chamber (3).