Plasma Processing Apparatus Abnormal Discharge Image Capture
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Solution Overview
Problem
Current plasma processing technologies can detect abnormal discharges but lack the necessary data to ascertain their cause, leading to inefficient and labor-intensive trial-and-error methods for reproducing and identifying the root of the issue.
Innovation Solution
A plasma processing apparatus equipped with a camera and image data extraction unit that captures and stores moving image data of abnormal discharges within the processing chamber, allowing for the analysis of the discharge state and its causes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If abnormal discharge detection is implemented using existing methods (probe electrode or camera), then the generation of abnormal discharge can be detected, but data useful for ascertaining the cause of the abnormality are not provided
Solution Approach 1:
The system performs preliminary action by continuously capturing moving image data of the processing chamber before abnormalities occur, and stores it in readiness. When abnormal discharge is detected, the system can immediately extract and provide the relevant time-period image data for cause analysis, eliminating the need for trial-and-error reproduction of the abnormality.
2Reliability
If trial-and-error tests are conducted to reproduce and ascertain the cause of abnormal discharge, then cause identification may be achieved, but much time and effort and labor are required
Solution Approach 1:
The system creates a visual copy (moving image data) of the actual abnormal discharge event as it occurred in the processing chamber. This copy preserves the spatial and temporal characteristics of the abnormality, allowing analysts to study the cause directly from the captured images without needing to reproduce the complex conditions that led to the abnormal discharge through time-consuming trial-and-error tests.
3Loss of information
If comprehensive data collection systems are implemented to capture cause analysis information, then useful data for ascertaining cause can be acquired, but device complexity increases
Solution Approach 1:
The system achieves multi-functionality by using a single camera to perform multiple tasks: continuous monitoring of the processing chamber, capturing moving image data, and providing both real-time abnormal discharge detection and post-event cause analysis. This universal approach eliminates the need for separate specialized sensors or complex data collection systems, thereby reducing overall device complexity while still providing comprehensive cause analysis data.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the acquisition of valuable data for determining the cause of abnormal discharges, reducing the time and effort required for troubleshooting and improving the stability of the plasma processing quality.
Implementation Method 1
The camera takes images of the inside of the vacuum chamber through the window portion and outputs moving image data
Implementation Method 2
The plasma processing execution portion introduces plasma generating gas into the processing chamber under a reduced pressure state in the processing chamber, excites the plasma generating gas by applying a high frequency voltage, and executes plasma processing
Data Source
AI summary
A plasma processing apparatus includes: a vacuum chamber; a plasma processing execution portion; a discharge state detecting unit; a window portion; a camera; a first storing portion; a second storing portion; and an image data extracting unit. The image data extracting unit extracts at least moving image data, which show the generation state of the abnormal discharge, from the first storing portion and stores the extracted moving image data in the second storing portion when the discharge state detecting unit detects the abnormal discharge.