Multi-Hole Arcing Sensor Layout for Plasma Chamber Wire Detection
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Solution Overview
Problem
Existing plasma treating apparatuses face challenges in effectively detecting arcing events within plasma chambers, which can lead to damage to semiconductor devices and increased maintenance requirements.
Innovation Solution
An arcing detection sensor is designed with a substrate having multiple through holes and circular conductive patterns arranged along the circumference of each hole, along with a coil conductive pattern surrounding these circular patterns. This configuration allows for enhanced detection of voltage and current in conductive wires, improving arcing detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high-frequency power is used in plasma chambers, then plasma processes can be performed, but arcing occurs causing damage to semiconductor devices and plasma chamber
Solution Approach 1:
The sensor detects arcing events before they cause significant damage by monitoring voltage and current anomalies in real-time. The circular conductive patterns and coil conductive pattern are positioned to detect early signs of arcing, allowing preventive action to be taken before the plasma chamber or semiconductor devices are damaged.
Solution Approach 2:
The arcing detection sensor acts as an intermediary between the high-frequency power source and the plasma chamber. It monitors the electrical parameters and provides early warning of arcing conditions, enabling the control system to intervene and prevent damage while allowing continuous plasma processing.
2Measurement precision
If conventional single through-hole sensor design is used, then device complexity is low, but arcing detection precision is insufficient
Solution Approach 1:
The sensor is divided into multiple through holes, each with its own circular conductive pattern for voltage detection. Multiple separate detection points allow the sensor to identify which specific conductive wire is experiencing arcing, significantly improving detection precision while maintaining manageable structural complexity.
Solution Approach 2:
The sensor incorporates both circular conductive patterns on the substrate plane for voltage detection and a coil conductive pattern in a third dimension for current detection. This multi-dimensional approach enables simultaneous voltage and current monitoring, enhancing arcing detection capability without excessive complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved arcing detection sensor effectively enhances the detection of arcing signals, reducing signal attenuation and improving the precision of identifying specific conductive wires involved in arcing events, thereby reducing damage and maintenance needs.
Implementation Method 1
each circular conductive pattern is configured to detect a voltage of a respective conductive wire passing through the respective through hole by electric field coupling
Implementation Method 2
the coil conductive pattern is configured to detect currents of the conductive wires passing through the plurality of through holes by magnetic field coupling
Data Source
AI summary
An arcing detection sensor comprises a substrate portion having a plurality of through holes; a plurality of circular conductive patterns, each circular conductive pattern arranged along a circumference of a respective through hole of the plurality of through holes; and a coil conductive pattern surrounding the plurality of circular conductive patterns. Each circular conductive pattern is configured to detect a voltage of a respective conductive wire passing through the respective through hole, and the coil conductive pattern is configured to detect currents of the conductive wires passing through the plurality of through holes.