Atmospheric Plasma Array for Uniform Surface Treatment

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Solution Overview

Problem

Current methods for applying low temperature atmospheric plasma (CAP) lack process control, resulting in non-uniform and non-repeatable treatment of surfaces, as they rely on manual movement of a single small plasma source without measurement or feedback control.

Innovation Solution

A system and method utilizing a plasma array with multiple atmospheric plasma sources, where each source is calibrated to deliver a predetermined dose distribution of reactive species across a treatment area through uniformity and dose modulation, ensuring consistent output.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a single small plasma source is manually moved over the treatment area, then the treatment can be applied to the surface, but the treatment uniformity and repeatability cannot be ensured

Engineering Contradiction:
Improvetreatment uniformityVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The plasma source is divided into multiple individual plasma elements arranged in an array, where each element can be independently controlled. This segmentation allows different zones of the treatment area to receive customized plasma exposure, ensuring uniformity across the entire surface while maintaining manageable system complexity through modular design.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system implements dynamic control of each plasma element through individual on/off switching during scanning, allowing real-time adjustment of plasma delivery. This dynamic modulation compensates for variations in plasma output and ensures consistent treatment uniformity across the treatment area.

Inventive Principle:
Principle #15Dynamics

2Reliability

If manual movement of plasma source is used, then the system is simple to operate, but process control and measurement capability are lacking

Engineering Contradiction:
Improveprocess controlVSAvoidoperational simplicity
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The system incorporates sensors that detect plasma characteristics during treatment and feed this information back to the control system. This feedback mechanism enables automatic adjustment of plasma element activation patterns to maintain consistent treatment quality, ensuring reliable process control while the automated system handles the complexity of manual operation.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The manual mechanical movement of a single plasma source is replaced with an automated scanning system that controls multiple plasma elements electronically. This substitution eliminates the need for manual operation while providing precise control and measurement capabilities through electronic modulation and sensor integration.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If plasma output is not measured or controlled, then the system is simpler, but treatment repeatability cannot be achieved

Engineering Contradiction:
Improvetreatment repeatabilityVSAvoidmeasurement and control complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system performs preliminary calibration of each plasma element before actual treatment, establishing baseline output characteristics for each element. This preliminary measurement and characterization data is stored and used to guide subsequent treatment operations, ensuring repeatability without requiring continuous complex measurements during each treatment process.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves uniform and repeatable plasma treatment by calibrating and modulating the output of each plasma element, ensuring consistent delivery of reactive species across the treatment area.

Implementation Method 1

Low temperature atmospheric plasma or cold atmospheric plasma (CAP) has been applied to surfaces to achieve biological effects

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 2

Most common atmospheric plasma sources are dielectric barrier discharges (DBD), which use AC voltages or voltage pulses to create the plasma

Methodology Applied
Scientific EffectDielectric barrier discharge:

Implementation Method 3

The reactive species output from each plasma element is measured, and an empirical element scaling factor is derived for each plasma element

Methodology Applied
Scientific EffectOptical emission spectroscopy:

Data Source

PatentUS12290697B2Process control for atmospheric plasma treatment of surfaces
Publication Date: 2025.05.06 WALTHER STEVEN R
  • US12290697B2 patent drawing
  • US12290697B2 patent drawing
  • US12290697B2 patent drawing

AI summary

Disclosed is a system and method for delivering reactive species from a plasma to a treatment area by scanning a linear array of stacked plasma elements across the treatment area. Reactive species output from each plasma element is calibrated, and during scanning each plasma element is modulated with a uniformity modulation and a dose modulation, enabling a predetermined contour dose distribution of reactive species to be delivered to the treatment area.