Plasma Cell VUV Filter Layer for Laser-Sustained Light Source

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Solution Overview

Problem

Traditional plasma bulbs in laser-sustained plasma light sources suffer from rapid damage and overheating due to absorption of short-wavelength UV light, leading to reduced optical transmission and potential bulb explosion, limiting the use of high-power laser-sustained plasma light sources.

Innovation Solution

A plasma cell with a plasma bulb that is transparent to the pump laser and partially transparent to collectable spectral regions of illumination, equipped with a filter layer, assembly, or liquid/gaseous filter to block selected spectral regions, particularly VUV radiation, using materials like hafnium oxide, titanium oxide, or nanocrystals to absorb or reflect short-wavelength light.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional fused silica glass plasma bulbs are used, then the bulb can contain the plasma and transmit light, but the bulb absorbs short-wavelength light below 170 nm causing rapid damage and overheating

Engineering Contradiction:
Improveplasma bulb lifespanVSAvoidVUV radiation damage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A filter layer or filter assembly is introduced as an intermediary component between the plasma and the plasma bulb wall. This intermediary selectively absorbs or reflects vacuum ultraviolet radiation (wavelengths below 170 nm) while allowing the plasma to remain contained and the bulb to function normally. The filter prevents harmful VUV radiation from reaching and damaging the fused silica glass, thereby resolving the contradiction between maintaining bulb reliability and blocking harmful radiation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The filter layer or filter assembly acts as a sacrificial, replaceable component that protects the more expensive and critical plasma bulb. The filter can be damaged or degraded by absorbing VUV radiation, but since it is designed to be replaceable, the main plasma bulb is preserved. This allows the system to tolerate damage in a disposable component rather than in the critical, expensive bulb assembly.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

2Reliability

If the plasma bulb blocks short-wavelength light to prevent damage, then bulb lifespan is extended, but optical transmission in the 190-260 nm range is reduced

Engineering Contradiction:
Improveplasma bulb lifespanVSAvoidoptical transmission
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The filter layer or filter assembly is designed with selective spectral properties that allow it to block only specific wavelength ranges (particularly below 170 nm) while remaining transparent to other wavelengths, especially the 190-260 nm range. This local quality approach ensures that the filter provides protection where needed without unnecessarily reducing optical transmission in the desired spectral region, thus resolving the contradiction between extending bulb lifespan and maintaining illumination intensity.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces solarization-induced damage, extends the lifespan of the plasma bulb, and prevents explosions by limiting the impact of VUV radiation, thereby enhancing the reliability and operational safety of high-power laser-sustained plasma light sources.

Implementation Method 1

a filter layer disposed on an interior surface of the plasma bulb, the filter layer configured to block a selected spectral region of the illumination emitted by the plasma

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

using materials like hafnium oxide, titanium oxide, or nanocrystals to absorb or reflect short-wavelength light

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 3

Laser-sustained light sources operate by focusing laser radiation into a gas volume in order to excite the gas, such as argon, xenon, mercury and the like, into a plasma state, which is capable of emitting light

Methodology Applied
Scientific EffectLaser pumping: Laser

Implementation Method 4

The absorption of laser power by the plasma then generates and sustains the plasma (e.g., 12K-14K plasma)

Methodology Applied
Scientific EffectPlasma emission: Plasma

Data Source

PatentUS20210231292A1Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source
Publication Date: 2021.07.29 KLA CORP
  • US20210231292A1 patent drawing
  • US20210231292A1 patent drawing
  • US20210231292A1 patent drawing

AI summary

A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.