Atmospheric Plasma Apparatus with Ceramic Nozzle for Gas Isolation
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Solution Overview
Problem
Conventional atmospheric pressure plasma apparatuses suffer from reagent loss of secondary gases when injected outside the plasma generation region, as they collide with plasma particles, leading to inefficient processing.
Innovation Solution
The apparatus design includes a porous first electrode and a second electrode forming an isolating space with a ceramic nozzle, allowing the secondary gas to pass through the nozzle and mix with plasma outside the plasma generation region, minimizing reagent loss by separating the plasma generation and injection paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the secondary gas is supplied to the plasma generation region to be ionized, then the processing capability is improved, but the reagent loss of secondary gas increases due to collision with plasma particles during injection
Solution Approach 1:
The apparatus divides the gas flow path into separate regions: the secondary gas flows through a dedicated injection path (nozzle) that is isolated from the plasma generation region, while plasma is generated in a separate electrode gap. This segmentation prevents collision between secondary gas and plasma particles during injection, reducing reagent loss while maintaining processing capability.
Solution Approach 2:
The patent introduces a ceramic nozzle as an intermediary component that mediates the injection of secondary gas into the processing region. The nozzle provides a protected pathway that allows secondary gas to reach the treatment area without direct exposure to plasma particles during the injection process, thereby minimizing reagent loss.
2Device complexity
If the source gas is converted into plasma between two electrodes and injected outside, then the plasma generation is simplified, but the secondary gas reagent is dissolved and lost during the injection process
Solution Approach 1:
The system segments the plasma generation function from the gas injection function. Plasma is generated in the electrode gap while secondary gas is injected through a separate nozzle system, allowing both functions to operate independently without interference and preventing reagent loss during injection.
Solution Approach 2:
The secondary gas injection path is extracted from the plasma generation region. By providing a separate nozzle system that bypasses the electrode gap, the patent removes the harmful interaction between injecting secondary gas and plasma particles, eliminating reagent loss while maintaining simple plasma generation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the dissolvability of secondary gases by reducing reagent loss and improving the mixing efficiency of plasma and secondary gases, enabling effective applications in surface modification, etching, and other processes.
Implementation Method 1
a radio frequency power supply is applied to the first and second electrodes to generate plasma in the isolating space from the source gas supplied through the first electrode
Implementation Method 2
a first electrode being porous and having a plurality of first penetrating holes
Data Source
AI summary
Disclosed is an atmospheric pressure plasma apparatus for enhancing and or controlling the dissociation of a secondary gas by converting a source gas into a plasma state at atmospheric pressure and controlling the interaction between that plasma and the secondary gas using porous metal, and ceramic tubes to create a path having controllable isolation from the region where plasma is generated.