Plasma Coating Atomizer With Multi-Compartment Aerosol Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing atomizers for atmospheric pressure, low-temperature plasma coating processes struggle with poor control over droplet size, concentration, and precursor concentration in the aerosol, especially when multiple substances are involved, leading to inefficiencies and potential substrate damage due to high temperatures.
Innovation Solution
An aerosol generating device with an aerosol droplet separator and multiple atomizing compartments, featuring a nozzle outlet, precursor recycling outlet, and dilution flow channels, allows precise control over droplet size and concentration through hydrodynamic regulation, enabling parallelization for increased flow and homogeneous coating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional atomizer is used to generate aerosol, then the aerosol can be produced, but poor control over droplet size, concentration, and precursor concentration is achieved
Solution Approach 1:
The atomizer is divided into multiple independent atomizing compartments (first, second, third compartments) that can be controlled separately. Each compartment has its own precursor reservoir, droplet introduction means, and dilution flow channel, allowing independent optimization of droplet size, concentration, and precursor content for different coating requirements.
Solution Approach 2:
The system incorporates adjustable parameters including variable flow rates for atomizer gas, dilution gas, and precursor flow; adjustable droplet introduction rates; and controllable dilution ratios. These dynamic adjustments enable real-time optimization of aerosol characteristics to achieve precise control over droplet size and concentration.
2Adaptability or versatility
If vaporization is used to transport precursor, then mixing with process gas is improved, but high temperature may damage substrate
Solution Approach 1:
Instead of vaporizing the precursor (liquid to gas phase transition) which generates high temperatures, the invention uses atomization to create fine liquid droplets (aerosol). The liquid precursor is broken down into small droplets that can be mixed with the plasmized process gas at lower temperatures, avoiding substrate damage while maintaining good mixing.
Solution Approach 2:
The atomizer acts as an intermediary device that converts liquid precursor into aerosol form without requiring high temperature vaporization. The aerosol serves as the intermediary carrier that allows the precursor to be transported and mixed with the process gas at controlled, lower temperatures suitable for substrate protection.
3Adaptability or versatility
If multiple precursors are used, then coating versatility is improved, but control over absolute and relative abundance becomes difficult
Solution Approach 1:
The atomizer is segmented into multiple independent compartments, each capable of handling a different precursor. This allows separate control and optimization of each precursor's flow rate, droplet size, and concentration. The first, second, and third compartments can independently regulate their respective precursors to achieve precise control over absolute and relative abundances in the final aerosol mixture.
Solution Approach 2:
The system allows independent adjustment of parameters for each precursor including flow rates, droplet introduction rates, and dilution ratios. By changing these parameters separately for each compartment, precise control over the absolute and relative abundances of multiple precursors in the aerosol is achieved, enabling versatile multi-precursor coating with accurate composition control.
4Productivity
If high flow rates are used to increase production speed, then productivity is improved, but control over aerosol parameters deteriorates
Solution Approach 1:
By dividing the atomizer into multiple independent compartments, each compartment can be optimized for high flow rates while maintaining control. The separate droplet introduction means and dilution flow channels in each compartment allow independent regulation even at high overall flow rates, preventing loss of aerosol parameter control during high-speed production.
Solution Approach 2:
The system incorporates dynamically adjustable parameters including variable flow rates for atomizer gas, dilution gas, and precursor flow; adjustable droplet introduction rates; and controllable dilution ratios. These dynamic adjustments enable the system to maintain precise aerosol parameter control even when operating at high flow rates to maximize production speed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Provides enhanced control over aerosol parameters, allowing for efficient and flexible generation of precursor-comprising aerosols, ensuring stable and homogeneous coatings even at high production speeds, and accommodating multiple precursors with varying properties.
Implementation Method 1
introducing droplets of a precursor from a precursor reservoir in said atomizer gas flow, thereby creating a precursor-comprising aerosol flow
Implementation Method 2
guiding a dilution flow into said aerosol channel via a dilution flow outlet, thereby hydrodynamically regulating size and/or quantity of droplets in the aerosol flow
Implementation Method 3
an aerosol droplet separator and a set of atomizing compartments, whereby the aerosol droplet separator comprises a nozzle outlet, a precursor recycling outlet and an aerosol channel therebetween
Data Source
AI summary
An aerosol-generating device is for generating a precursor-comprising aerosol flow for a plasma coating process and includes an aerosol droplet separator and a set of atomizing compartments. The aerosol droplet separator has a nozzle outlet, a precursor recycling outlet and an aerosol channel therebetween.