Multi-source Plasma Coating Device with Ground Grid Shielding
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Solution Overview
Problem
High-power, large-area high-frequency discharge sources in existing plasma polymerized coating devices generate plasma with uneven spatial distribution, leading to poor product quality uniformity and excessive destruction of chemical monomers, due to instability and crosstalk among multiple discharge sources.
Innovation Solution
A multi-source low-power low-temperature plasma polymerized coating device with multiple discharge cavities mounted close to each other in a vacuum chamber, using a porous electrode plate and grid mesh to prevent electromagnetic interference and allow even plasma distribution, connected to low-power high-frequency power sources and gas pipelines for controlled polymerization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single high-frequency discharge source with large area and high power is used, then production efficiency is improved and more base materials can be treated simultaneously, but the plasma energy is high and density is high which excessively destroys chemical monomer structure and causes bad quality of formed polymer coating
Solution Approach 1:
The patent divides a single large-area discharge source into multiple small-area discharge sources arranged in an array. Each discharge source operates independently at low power, collectively treating multiple base materials simultaneously while maintaining low plasma energy and density to preserve monomer structure integrity.
2Productivity
If a single high-frequency discharge source with large area is used, then more base materials can be treated simultaneously, but the generated plasma is uneven in spatial distribution so that the quality of products under batch treatment has bad uniformity
Solution Approach 1:
The discharge source is segmented into multiple small sources distributed across the treatment area. Each source generates plasma locally, ensuring uniform plasma distribution across all base materials in the batch, thereby improving product quality consistency.
Solution Approach 2:
Each discharge source is positioned to treat specific base materials locally, providing tailored plasma treatment to each item in the batch. This localized approach ensures uniform treatment quality across all products while maintaining high batch treatment capacity.
3Object-affected harmful factors
If multiple high-frequency discharge sources with small area and low power are combined, then plasma energy and density are reduced to preserve monomer structure, but different discharge sources have mutual crosstalk and are unstable in operation which may burn out power supplies
Solution Approach 1:
The patent introduces a ground grid as an intermediary structure positioned between adjacent discharge sources. This ground grid acts as a shielding barrier that blocks electromagnetic field crosstalk between neighboring discharge sources, enabling stable operation of multiple low-power sources without mutual interference.
4Reliability
If the distance among multiple high-frequency discharge sources is increased to reduce crosstalk, then mutual interference is reduced, but the generated plasmas are uneven in spatial distribution
Solution Approach 1:
Instead of increasing distance between discharge sources, the patent uses ground grids as intermediary shielding structures that can be placed close to each other. These grids block electromagnetic crosstalk while allowing the discharge sources to maintain close spacing for uniform plasma distribution.
Solution Approach 2:
The patent solves the crosstalk problem not by increasing horizontal distance between discharge sources, but by introducing a vertical dimension with ground grids positioned between the sources. This dimensional approach allows close spacing while blocking interference paths.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves even plasma distribution and improved product quality uniformity by reducing plasma energy and density, minimizing monomer destruction, and allowing for stable operation of multiple discharge sources without crosstalk, resulting in high-quality polymer coatings.
Implementation Method 1
A plane grounding grid mesh is mounted at the opening of each discharge cavity that leads to the main vacuum chamber to shield mutual crosstalk among the discharge cavities
Implementation Method 2
The porous electrode plate is parallel to the grid mesh and keeps a small gap with the grid mesh to eliminate the plasma therebetween and prevent electromagnetic waves in the discharge cavities from propagating into the main vacuum chamber through the plasma
Implementation Method 3
The porous electrode plate in each discharge cavity is connected with a low-power high-frequency power source through a conducting wire. The porous electrode plate in each discharge cavity is connected with a low-power high-frequency power source so that the porous electrode plate discharges the wall of the discharge cavity and the plasma is produced in the discharge cavity
Implementation Method 4
The carrier gas and the monomer steam are discharged in each discharge cavity. The monomer steam is polymerized; and under the driving of the carrier airflow, polymerisate passes through small holes and the grid mesh successively in the porous electrode plate to enter the vacuum chamber and deposit on the surface of the base material to form a polymer coating
Implementation Method 5
A vacuum exhaust tube is connected to the main vacuum chamber, and the other end of the vacuum exhaust tube is connected to the vacuum pump
Implementation Method 6
under the driving of the carrier airflow, polymerisate passes through small holes and the grid mesh successively in the porous electrode plate to enter the vacuum chamber and deposit on the surface of the base material to form a polymer coating
Data Source
AI summary
A multi-source low-power low-temperature plasma polymerized coating device and method belong to the technical field of plasma. In the device, a plurality of discharge cavities are mounted on the wall of a main vacuum chamber; a plane grounding grid mesh and a porous electrode plate are mounted in each discharge cavity; and the porous electrode plate is parallel to the grid mesh, keeps a gap with the grid mesh and is connected with a low-power high-frequency power source. A carrier gas pipeline and a monomer steam pipeline are respectively connected to each discharge cavity. To-be-treated base material is placed in the main vacuum chamber. The vacuum pump is started to feed carrier gas and monomer steam. The wall of the discharge cavity is discharged by the porous electrode plate; the monomer steam is polymerized; and the polymerisate passes through small holes and the grid mesh successively in the porous electrode plate to enter the vacuum chamber and deposit on the surface of the base material to form a polymer coating. The device of the present invention has the advantages of even spatial distribution of plasma, good quality uniformity of products under batch treatment, low plasma energy and density, difficult in excessively destroying a chemical monomer structure and good quality of the formed polymer coating.