Plasma Resistant Coating Selectivity via Silane Monolayer

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Solution Overview

Problem

Conventional methods for applying thermal spray coatings in complex part architectures, such as high aspect ratio pump slot features, suffer from overspray issues due to the lack of selectivity, leading to cosmetic anomalies and potential defects, with conventional masking materials being incompatible and bead blasting techniques damaging the underlying layers.

Innovation Solution

The method involves chemically treating the part with a molecular monolayer or sacrificial inorganic thin film to inhibit adhesion of the thermal spray coating, followed by gentle cleaning methods to remove overspray, using materials like perfluoronated organosilane to alter surface adhesion and reduce van der Waals attraction, and employing dry ice blasting or chemical dissolution for effective removal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional masking materials are used to prevent overspray, then selectivity is improved, but the masking materials are incompatible with the thermal spray coating process

Engineering Contradiction:

ImproveselectivityVSAvoidcompatibility

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The patent uses an intermediary substance (silane-based molecular monolayer or sacrificial inorganic thin film) deposited on the substrate to mediate between the thermal spray coating process and the substrate surface. This intermediary layer provides the desired selectivity and compatibility, preventing direct interaction between the conventional masking materials and the thermal spray process while enabling precise coating control.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the physical and chemical parameters of the surface by depositing a molecular monolayer or thin film that alters surface energy, adhesion properties, and chemical reactivity. This parameter change enables the surface to resist thermal spray coating adhesion in specific areas while maintaining compatibility with the coating process, resolving the contradiction between selectivity and compatibility.

Inventive Principle:

Principle #35Parameter changes

2Ease of manufacture

If bead blasting techniques are used to remove overspray, then cleaning effectiveness is improved, but the underlying layers are damaged

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidintegrity of underlying layer

Core Design Contradiction:

Ease of manufactureVSStrength

Solution Approach 1:

The patent converts the potential harm of overspray into a beneficial process feature by designing a sacrificial inorganic thin film that intentionally attracts and holds the overspray. This allows for controlled, gentle removal of overspray through chemical dissolution or mild cleaning methods, transforming the harmful overspray effect into a manageable process element that protects the underlying layer from damage.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent employs a sacrificial inorganic thin film that is designed to be temporary and disposable. This thin film serves its purpose during the coating process by capturing overspray, then is easily removed through gentle cleaning methods, eliminating the need for aggressive bead blasting that would damage the underlying layer. The sacrificial nature of this layer enables effective overspray removal without compromising structural integrity.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

3Area of stationary object

If thermal spray coating is applied to complex part architectures, then coating coverage is improved, but overspray issues increase

Engineering Contradiction:

Improvecoating coverageVSAvoidoverspray control

Core Design Contradiction:

Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by depositing the silane-based molecular monolayer or sacrificial inorganic thin film on the substrate before the thermal spray coating process. This pre-deposited layer prepares the surface to control overspray adhesion in advance, enabling subsequent gentle removal methods and preventing permanent overspray defects in complex part architectures while maintaining comprehensive coating coverage.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach ensures precise application of plasma-resistant ceramic coatings with minimal overspray, maintaining the integrity of the underlying layer and simplifying the manufacturing process, making it more production-friendly and cost-effective.

Implementation Method 1

using materials like perfluoronated organosilane to alter surface adhesion and reduce van der Waals attraction

Methodology Applied

Scientific Effectvan der Waals attraction: Van der Waals Force

Implementation Method 2

A plasma resistant ceramic coating is applied on the part

Methodology Applied

Scientific EffectPlasma resistance: Plasma

Data Source

PatentUS11124659B2Method to selectively pattern a surface for plasma resistant coat applications

Publication Date: 2021.09.21 LAM RES CORP

AI summary

A method for providing a part with a plasma resistant ceramic coating for use in a plasma processing chamber is provided. A patterned mask is placed on the part. A film is deposited over the part. The patterned mask is removed. A plasma resistant ceramic coating is applied on the part.