Plasma Container Coating With Solid-State Microwave Coupling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing container coating technologies are complex and require intricate components like magnetrons and sensors for plasma generation, leading to a cumbersome design and control system.
Innovation Solution
The use of a solid-state microwave generator directly connected to the plasma chamber via a quartz disk, eliminating the need for waveguides and sensors, simplifies the construction and control of the plasma deposition process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a magnetron and waveguide are used to generate plasma, then plasma generation is achieved, but the device construction becomes complex
Solution Approach 1:
The patent extracts and removes the waveguide component from the plasma generation system, directly connecting the solid-state microwave generator to the plasma chamber. This elimination of the waveguide simplifies the device construction while maintaining plasma generation capability, directly resolving the technical contradiction between reliability and device complexity.
Solution Approach 2:
The patent introduces a solid-state microwave generator as an intermediary device that directly couples microwave energy to the plasma chamber without requiring a waveguide. This intermediary approach simplifies the overall system architecture while ensuring reliable plasma generation through precise power control.
2Reliability
If sensors and monitor diodes are installed to control plasma, then process control is improved, but the device design becomes more complex
Solution Approach 1:
The patent removes sensors and monitor diodes from the plasma chamber, eliminating the need for complex detection and control systems. The solid-state microwave generator inherently provides stable plasma generation without requiring additional sensing components, thus simplifying the design while maintaining process control.
Solution Approach 2:
The solid-state microwave generator performs self-regulation of plasma generation without external sensors or feedback systems. The generator's inherent stability and control capabilities allow it to maintain optimal plasma conditions autonomously, eliminating the need for additional control components.
3Power
If an antenna and coaxial cable are used to introduce energy, then plasma ignition is achieved, but the construction becomes more complex
Solution Approach 1:
The patent eliminates the antenna and coaxial cable assembly from the energy introduction system, establishing a direct connection between the solid-state microwave generator and the plasma chamber. This removal of intermediate components simplifies the construction while maintaining effective energy transfer for plasma ignition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances plasma deposition reliability and process control, simplifies the design by removing sensors and monitor diodes, and allows for targeted excitation of desired modes without complex quartz glass or sensor detection.
Implementation Method 1
a microwave generator (1) in the form of a solid-state generator (1) which ignites and maintains the plasma (5) in the plasma chamber (8)
Implementation Method 2
a plasma chamber (8) with a container (9) to be coated, in which a plasma (5) is ignited
Implementation Method 3
The at least one microwave generator (1) is directly connected to the at least one plasma chamber (8) via a quartz disk (7) arranged at the point of introduction
Implementation Method 4
improved plasma deposition on the inner wall of the vessel
Data Source
Figure 1~1a
Figure 2~2a
Figure 3~3a
AI summary
The invention relates to a device and a plasma method for coating containers having a container interior, the device having at least one plasma station, which comprises at least one plasma chamber with at least one treatment location, for the insertion and positioning of the container. Each plasma chamber has a vacuum line, which is connected to a vacuum unit, and a gas lance, which can be inserted into the container interior and is connected to a process gas line. Each plasma chamber is connected to at least one microwave generator, which has: - a control unit; - a signal generator; and - a power supply, the at least one microwave generator being a solid state generator comprising a solid state amplifier. In the at least one plasma chamber, there is no sensor for controlling the microwave generator and no monitoring diode for sensing the currently present power of the microwave generator.