Plasma Component Alumite Coating Adhesion via Surface Roughening

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Solution Overview

Problem

In plasma processing apparatuses, components with through holes exposed to plasma suffer from poor adhesivity of thermally sprayed films to alumite layers, leading to discharge issues and potential damage near the ends of these holes.

Innovation Solution

A component for plasma processing apparatuses is manufactured with a base material having through holes, where the surface is roughened and then coated with an alumite layer followed by a thermally sprayed film, enhancing adhesivity and withstand voltage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an alumite layer is formed on the base material surface by anodic oxidation process, then plasma resistance is improved, but adhesivity of the thermally sprayed film to the surface deteriorates

Engineering Contradiction:

Improveplasma resistanceVSAvoidadhesivity of thermally sprayed film

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The patent applies preliminary roughening treatment to the base material surface before forming the alumite layer. This preliminary action creates a rough surface structure that enhances mechanical interlocking between the alumite layer and the subsequent thermally sprayed film, thereby improving adhesivity while preserving the plasma resistance benefits of the alumite layer.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent creates a composite structure consisting of three layers: the base material, the alumite layer with improved adhesivity through roughening, and the thermally sprayed film. This composite material approach combines the plasma resistance of the alumite layer with the enhanced mechanical bonding provided by the roughened surface, resolving the contradiction between plasma resistance and film adhesivity.

Inventive Principle:

Principle #40Composite materials

2Strength

If the alumite layer is removed and roughening is performed on the first surface, then adhesivity of the thermally sprayed film is improved, but withstand voltage near the ends of through holes deteriorates

Engineering Contradiction:

Improveadhesivity of thermally sprayed filmVSAvoidwithstand voltage

Core Design Contradiction:

StrengthVSReliability

Solution Approach 1:

The patent performs roughening as a preliminary action on the base material surface before forming the alumite layer, rather than removing the alumite layer after formation. This timing of the roughening action allows the alumite layer to form over the roughened surface, maintaining electrical insulation properties and withstand voltage while still achieving good adhesivity for the thermally sprayed film.

Inventive Principle:

Principle #10Preliminary action

3Reliability

If a thermally sprayed film is formed on an alumite layer, then plasma resistance is enhanced, but discharge occurs near the ends of through holes causing damage

Engineering Contradiction:

Improveplasma resistanceVSAvoiddischarge damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies roughening as a preliminary treatment to the base material surface before alumite layer formation. This preliminary roughening creates a surface structure that prevents discharge initiation at the through hole ends by eliminating smooth surfaces where discharge could easily occur, thereby preventing damage while maintaining plasma resistance.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent converts the potentially harmful effect of the alumite layer (which can cause poor film adhesivity) into a benefit by applying roughening before alumite formation. The roughened surface actually improves the overall system performance by preventing discharge damage, transforming what could be a harmful surface property into a beneficial discharge-preventing feature.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The approach improves the withstand voltage and reduces damage from discharges by ensuring a robust adhesivity of the thermally sprayed film on the alumite layer, particularly at the ends of the through holes.

Implementation Method 1

an alumite layer is formed on a surface of the base material having the rough surface by an anodic oxidation process

Methodology Applied

Scientific EffectAnodic oxidation: Anodising

Implementation Method 2

a thermally sprayed film is formed on the rough surface with the alumite layer therebetween

Methodology Applied

Scientific EffectThermal spraying: Plasma Spray

Data Source

PatentUS11473182B2Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component

Publication Date: 2022.10.18 TOKYO ELECTRON LTD

AI summary

A component for use in a plasma processing apparatus, which is to be exposed to a plasma, includes a base material, an alumite layer and a thermally sprayed film. The base material has a plurality of through holes and a rough surface at which one end of each of the through holes is opended. The alumite layer is formed on a surface of the base material having the rough surface by an anodic oxidation process. The thermally sprayed film is formed on the rough surface with the alumite layer therebetween.