Plasma Processing Component Coating for Recess Edge Protection
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Solution Overview
Problem
Existing methods for producing components for plasma processing apparatuses using atmospheric plasma spraying face challenges in ensuring the durability and stability of thermal-sprayed films, particularly at the edges where they overlap with recesses, leading to potential damage and exposure to high voltages.
Innovation Solution
A component for plasma processing apparatuses featuring a base member with a thermal-sprayed film that includes a first thermal-sprayed film with high withstand voltage and a second thermal-sprayed film with higher plasma resistance, applied in a specific configuration to cover the first film and recess edges, ensuring continuous coverage and protection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single-layer thermal-sprayed film is applied to the base member surface, then the manufacturing process is simple, but the film durability and stability are insufficient, especially at edge regions
Solution Approach 1:
The thermal-sprayed film is divided into multiple layers: a first thermal-sprayed film layer and a second thermal-sprayed film layer. This segmentation allows each layer to perform different functions - the first layer provides base protection while the second layer enhances plasma resistance and edge coverage, thereby improving overall film durability without requiring a single complex material
Solution Approach 2:
The patent employs composite material structure by applying different thermal spray materials in sequence. The first thermal-sprayed film uses one material composition while the second thermal-sprayed film uses another material composition, creating a composite coating system that combines the advantages of both materials to achieve superior durability and plasma resistance
2Reliability
If the thermal-sprayed film is applied without a recess structure, then the manufacturing process is simpler, but the film edges are exposed to plasma and high voltages causing damage
Solution Approach 1:
The recess structure is formed on the base member surface before applying the thermal-sprayed film. This preliminary action creates a geometric feature that enables the film to extend into the recess region, providing continuous coverage and protecting the film edges from plasma and high voltage exposure during subsequent operation
Solution Approach 2:
The recess structure introduces a vertical dimension to the coating geometry. Instead of a flat surface coating, the film is applied to a three-dimensional surface that extends into the recess, creating overlapping edge regions that provide enhanced protection and prevent film exposure to harmful plasma environments
3Area of stationary object
If the first thermal-sprayed film is made thick to ensure coverage, then coverage is improved, but the second thermal-sprayed film cannot properly cover the distal edge portion
Solution Approach 1:
The coating is segmented into two distinct layers with different thicknesses and material compositions. The first layer provides bulk coverage while the second layer is specifically designed to cover the distal edge portion within the recess. This segmentation allows precise control over edge coverage without requiring the entire film to be excessively thick
Solution Approach 2:
Different regions of the coating have different properties: the first thermal-sprayed film provides general surface coverage, while the second thermal-sprayed film is specifically tailored for edge region coverage. This local quality differentiation ensures that each region receives the appropriate material and thickness for its specific functional requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides enhanced durability and stability of the thermal-sprayed films, preventing damage from plasma exposure and maintaining film integrity, thereby extending the component's lifespan and performance.
Implementation Method 1
a coating film is formed on a component by atmospheric plasma spraying
Data Source
AI summary
A component for plasma processing apparatus includes a base member and a thermal-sprayed film on a surface of the base member. The surface of the base member includes a main surface and a recess descending from the main surface of the base member at a position overlapping a distal edge portion of the thermal-sprayed film. The thermal-sprayed film includes a first thermal-sprayed film formed as a continuous film over the main surface of the base member and a part of a region inside the recess, and a second thermal-sprayed film including a material different from the first thermal-sprayed film, and being formed as a continuous film over the first thermal-sprayed film to cover the first thermal-sprayed film and over another part of the region inside the recess not covered by the first thermal-sprayed film.